METHOD OF REMOVING AN ETCH MASK
YEN BI MING, SHIH JUI MING, CHEN NAI CHIA, CHUO TSUNG MIN, CHU CHUN HAN, HUANG PING JUNG
Year of Publication 04.02.2020
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Year of Publication 04.02.2020
Patent
METHOD OF REMOVING AN ETCH MASK
YEN BI MING, SHIH JUI MING, CHEN NAI CHIA, CHUO TSUNG MIN, CHU CHUN HAN, HUANG PING JUNG
Year of Publication 07.06.2018
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Year of Publication 07.06.2018
Patent
IMPROVED ETCHING PROCESS
LIN YIH ANN, JANG SYUN MING, YEH MING HSI, YEN BI MING, CHEN CHAO CHENG
Year of Publication 12.04.2016
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Year of Publication 12.04.2016
Patent
TRIODE REACTOR DESIGN WITH MULTIPLE RADIOFREQUENCY POWERS
MARAKHTANOV ALEXEI, YEN BI MING, BAILEY ANDREW D. III, DHINDSA RAHINDER, DELGADINO GERARDO, HUDSON ERIC
Year of Publication 05.08.2014
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Year of Publication 05.08.2014
Patent
METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
DELGADINO GERARDO A, CHENG YU, SIRARD STEPHEN M, YEN BI MING, TAKESHITA KENJI, BAILEY ANDREW D. III, LE DANIEL, JI BING, MORAVEJ MARYAM, KO, JUNG MIN, HUDSON ERIC A, HEFTY ROBERT C
Year of Publication 08.05.2017
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Year of Publication 08.05.2017
Patent
Etch and Wet Clean Challenges and Joint Optimization
Yen, Bi-Ming, Lin, Johnny, Lee, Chris, Hegarty, Mike, Loewenhardt, Peter
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
IN-SITU PHOTORESIST STRIP DURING PLASMA ETCHING OF ACTIVE HARD MASK
YEN BI MING, CHO, SANG JUN, KANG, SEAN S, HAN TAEJOON, GOPALADASU PRABHAKARA, CHOI TOM
Year of Publication 11.03.2010
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Year of Publication 11.03.2010
Patent
WAFER CLEANING APPARATUS AND METHOD
Huang, Ping-Jung, HUANG, Jieh-Chau, Hsia, Pei Yen, Yen, Bi-Ming, Hu, Hung-Lung, Hsia, Ying Ting
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
Patent
Wafer cleaning apparatus and method
Huang, Ping-Jung, Hsia, Pei Yen, Huang, Jieh-Chau, Yen, Bi-Ming, Hu, Hung-Lung, Hsia, Ying Ting
Year of Publication 19.09.2023
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Year of Publication 19.09.2023
Patent
METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
DELGADINO GERARDO A, CHENG YU, SIRARD STEPHEN M, YEN BI MING, TAKESHITA KENJI, BAILEY ANDREW D. III, LE DANIEL, JI BING, MORAVEJ MARYAM, KO, JUNG MIN, HUDSON ERIC A, HEFTY ROBERT C
Year of Publication 31.01.2012
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Year of Publication 31.01.2012
Patent
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
CHOU, Bo-Wei, HUANG, Ping-Jung, LIN, Chin-Ming, YU, Pi-Chun, YEN, Bi-Ming, CHANG, Chung-Wei, SHEN, Peng
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
Patent
Method of removing an etch mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Chuo, Tsung-Min, Shih, Jui-Ming, Chen, Nai-Chia
Year of Publication 08.11.2022
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Year of Publication 08.11.2022
Patent
WAFER CLEANING APPARATUS AND METHOD
HUANG, Jieh-Chau, HSIA, Ying Ting, HU, Hung-Lung, HUANG, Ping-Jing, YEN, Bi-Ming, HSIA, Pei Yen
Year of Publication 07.10.2021
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Year of Publication 07.10.2021
Patent
Wafer cleaning apparatus and method
Huang, Ping-Jung, Hsia, Pei Yen, Huang, Jieh-Chau, Yen, Bi-Ming, Hu, Hung-Lung, Hsia, Ying Ting
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
Patent