On-chip spiral inductors suspended over deep copper-lined cavities
Hongrui Jiang, Ye Wang, Yeh, J.-L.A., Tien, N.C.
Published in IEEE transactions on microwave theory and techniques (01.12.2000)
Published in IEEE transactions on microwave theory and techniques (01.12.2000)
Get full text
Journal Article
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Yeh, J.-L.A., Hongrui Jiang, Tien, N.C.
Published in Journal of microelectromechanical systems (01.12.1999)
Published in Journal of microelectromechanical systems (01.12.1999)
Get full text
Journal Article
Electrostatic model for an asymmetric combdrive
Yeh, J.-L.A., Hui, C.-Y., Tien, N.C.
Published in Journal of microelectromechanical systems (01.03.2000)
Published in Journal of microelectromechanical systems (01.03.2000)
Get full text
Journal Article
Copper-encapsulated silicon micromachined structures
Yeh, J.-L.A., Hongrui Jiang, Neves, H.P., Tien, N.C.
Published in Journal of microelectromechanical systems (01.09.2000)
Published in Journal of microelectromechanical systems (01.09.2000)
Get full text
Journal Article
Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating
Jiang, H., Wang, Y., Yeh, J.-L.A., Tien, N.C.
Published in 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017) (2000)
Published in 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017) (2000)
Get full text
Conference Proceeding
Journal Article
Characterizations of adhesion and motion behavior for electrothermal actuator
Yen-Jyh Lai, Chengkuo Lee, Chia-Yu Wu, Wen-Chih Chen, Chihchung Chen, Weileun Fang, Yeh, J.-L.A., Ruey-Shing Huang
Published in 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers (2002)
Published in 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers (2002)
Get full text
Conference Proceeding
Electromagnetically shielded high-Q CMOS-compatible copper inductors
Hongrui Jiang, Yeh, J.-L.A., Ye Wang, Norman Tien
Published in 2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.00CH37056) (2000)
Published in 2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.00CH37056) (2000)
Get full text
Conference Proceeding
Journal Article
Calculation of electrostatic forces and torques in MEMS using path-independent integrals
Hui, C-Y, Yeh, J-L A, Tien, N C
Published in Journal of micromechanics and microengineering (01.09.2000)
Published in Journal of micromechanics and microengineering (01.09.2000)
Get full text
Journal Article