Polishing compositions for noble metals
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Year of Publication 18.09.2007
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Year of Publication 18.09.2007
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Polishing compositions for noble metals
Thomas, Terence, Wang, Hongyu, Ye, Qianqiu, Reinhardt, Heinz, Sachan, Vikas
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Year of Publication 18.09.2003
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Polishing composition for CMP having abrasive particles
Thomas, Terence, Wang, Hongyu, Ye, Qianqiu, Reinhardt, Heinz, Sachan, Vikas
Year of Publication 09.01.2003
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Year of Publication 09.01.2003
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Method and composition for polishing by CMP
Thomas, Terence, Ye, Qianqiu, So, Joseph, Goldberg, Wendy, Godfrey, Wade
Year of Publication 10.10.2002
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Year of Publication 10.10.2002
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Polishing compositions for noble metals
Thomas, Terence, Wang, Hongyu, Ye, Qianqiu, Reinhardt, Heinz, Sachan, Vikas
Year of Publication 04.04.2002
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Year of Publication 04.04.2002
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Method and composition for polishing by CMP
Thomas, Terence M, Ye, Qianqiu Christine, So, Joseph K, Goldberg, Wendy B, Godfrey, Wade
Year of Publication 11.03.2003
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Year of Publication 11.03.2003
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Control of removal rates in CMP
Thomas, Terence M, Ye, Qianqiu (Christine), So, Joseph K, Burke, Peter A
Year of Publication 05.11.2002
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Year of Publication 05.11.2002
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Chemical mechanical polishing slurries for metal
Lack, Craig D, Luo, Qiuliang, Ye, Qianqiu (Christine), Sachan, Vikas, Thomas, Terence M, Burke, Peter A
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
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Composition and method for polishing in metal CMP
Langlois, Elizabeth, Sachan, Vikas, Ye, Qianqiu, Pierce, Keith, Lack, Craig, Thomas, Terence, Burke, Peter, Gettman, David, Lane, Sarah
Year of Publication 25.09.2003
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Year of Publication 25.09.2003
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Composition and method for polishing in metal CMP
Sachan, Vikas, Langlois, Elizabeth A. (Kegerise), Ye, Qianqiu (Christine), Pierce, Keith G, Lack, Craig D, Thomas, Terence M, Burke, Peter A, Gettman, David, Lane, Sarah
Year of Publication 02.03.2004
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Year of Publication 02.03.2004
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