Applications of single-wafer rapid-thermal processing to the manufacture of advanced flash memory
Kuang-Chao Chen, Hsueh-Hao Shih, Yaw-Lin Hwang, Cheng-Chen Hsueh, Chung, H., Pan, S., Chih-Yuan Lu
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-μm floating-gate flash memory
Luoh, T., Tzung-Ting Han, Yun-Chi Yang, Kuang-Chao Chen, Hsueh-Hao Shih, Yaw-Lin Hwang, Cheng-Chen Hsueh, Chung, H., Pan, S., Chih-Yuan Lu
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Applications of single-wafer thermal processing to 0.15-μm high-density MROM
Shu-Ya Hsu, Tzu-Yu Wang, Hsueh-Hao Shih, Kuang-Chao Chen, Yaw-Lin Hwang, Cheng-Chen Hsueh, Chung, H., Pan, S., Chih-Yuan Lu
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Process optimization and productivity improvement by real-time data collection system
Tuung Luoh, Ling-Wuu Yang, Hsueh-Hao Shih, Chi-Tung Huang, Kuang-Chao Chen, Yaw-Lin Hwang, Hsueh, C., Chung, H.
Published in Semiconductor Manufacturing Technology Workshop, 2002 (2002)
Published in Semiconductor Manufacturing Technology Workshop, 2002 (2002)
Get full text
Conference Proceeding
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-[micro]m floating-gate flash memory
Luoh, Tuung, Han, Tzung-Ting, Yang, Yun-Chi, Chen, Kuang-Chao, Shih, Hsueh-Hao, Hwang, Yaw-Lin, Hsueh, Cheng-Chen, Chung, H, Pan, S, Lu, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Applications of single-wafer thermal processing to 0.15-[micro]m high-density MROM
Hsu, Shu-Ya, Wang, Tzu-Yu, Shih, Hsueh-Hao, Chen, Kuang-Chao, Hwang, Yaw-Lin, Hsueh, Cheng-Chen, Chung, H, Pan, S, Lu, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-mum floating-gate flash memory
Luoh, Tuung, Han, Tzung-Ting, Yang, Yun-Chi, Chen, Kuang-Chao, Shih, Hsueh-Hao, Hwang, Yaw-Lin, Hsueh, Cheng-Chen, Chung, H, Pan, S, Lu, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Applications of single-wafer thermal processing to 0.15-mum high-density MROM
Hsu, Shu-Ya, Wang, Tzu-Yu, Shih, Hsueh-Hao, Chen, Kuang-Chao, Hwang, Yaw-Lin, Hsueh, Cheng-Chen, Chung, H, Pan, S, Lu, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Applications of single-wafer thermal processing to 0.15-/spl mu/m high-density MROM
Shu-Ya Hsu, Tzu-Yu Wang, Hsueh-Hao Shih, Kuang-Chao Chen, Yaw-Lin Hwang, Cheng-Chen Hsueh, Chung, H., Pan, S., Chih-Yuan Lu
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-/spl mu/m floating-gate flash memory
Tuung Luoh, Tzung-Ting Han, Yun-Chi Yang, Kuang-Chao Chen, Hsueh-Hao Shih, Yaw-Lin Hwang, Cheng-Chen Hsueh, Chung, H., Pan, S., Chih-Yuan Lu
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article
Applications of single-wafer thermal processing to 0.15-μm high-density MROM : Single-wafer manufacturing in the nanochip era
HSU, Shu-Ya, WANG, Tzu-Yu, SHIH, Hsueh-Hao, CHEN, Kuang-Chao, HWANG, Yaw-Lin, HSUEH, Cheng-Chen, CHUNG, Henry, PAN, Sam, LU, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (2003)
Get full text
Published in IEEE transactions on semiconductor manufacturing (2003)
Journal Article
Applications of single-wafer rapid-thermal processing to the manufacture of advanced flash memory : Single-wafer manufacturing in the nanochip era
CHEN, Kuang-Chao, SHIH, Hsueh-Hao, HWANG, Yaw-Lin, HSUEH, Cheng-Chen, CHUNG, Henry, PAN, Sam, LU, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (2003)
Get full text
Published in IEEE transactions on semiconductor manufacturing (2003)
Journal Article
Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-μm floating-gate flash memory : Single-wafer manufacturing in the nanochip era
TUUNG LUOH, HAN, Tzung-Ting, YANG, Yun-Chi, CHEN, Kuang-Chao, SHIH, Hsueh-Hao, HWANG, Yaw-Lin, HSUEH, Cheng-Chen, CHUNG, Henry, PAN, Sam, LU, Chih-Yuan
Published in IEEE transactions on semiconductor manufacturing (2003)
Get full text
Published in IEEE transactions on semiconductor manufacturing (2003)
Journal Article