New complementary PVD-Ta/CVD-WN stacked barrier structure for copper metallization
Kaori Tai, Ohtorii, H., Takahashi, S., Komai, N., Horikoshi, H., Sato, S., Ohoka, Y., Segawa, Y., Ishihara, M., Yasuda, Z., Nogami, T.
Published in Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No.02EX519) (2002)
Published in Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No.02EX519) (2002)
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Conference Proceeding
Fragile porous low-k/copper integration by using electro-chemical polishing
Takahashi, S., Tai, K., Ohtorii, H., Komai, N., Segawa, Y., Horikoshi, H., Yasuda, Z., Yamada, H., Ishihara, M., Nogami, T.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
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Conference Proceeding
A Case of Primary Alveolar Hypoventilation Syndrome
Tatsumi, Koichiro, Tojima, Hirokazu, Yasuda, Zyunichi, Kunitomo, Fumio, Okita, Shinya, Yuguchi, Yasutoshi, Okada, Osamu, Yamaguchi, Tetsuo, Ohsima, Hitoshi, Yamashita, Michitaka, Kimura, Hiroshi, Kuriyama, Takayuki, Watanabe, Shohei, Honda, Yoshiyuki
Published in Nihon Kyōbu Shikkan Gakkai zasshi (01.05.1987)
Published in Nihon Kyōbu Shikkan Gakkai zasshi (01.05.1987)
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Journal Article
Newly developed electro-chemical polishing process of copper as replacement of CMP suitable for damascene copper inlaid in fragile low-k dielectrics
Sato, S., Yasuda, Z., Ishihara, M., Komai, N., Ohtorii, H., Yoshio, A., Segawa, Y., Horikoshi, H., Ohoka, Y., Tai, K., Takahashi, S., Nogami, T.
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
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Conference Proceeding
Fischer indolization and its related compounds. XVIII: Formation of our unexpected angular benz[e]indoles on Fischer indolization of ethyl phenylpyruvate 2-[(1,4-dimethoxy-2-naphthyl)hydrazone]
ISHII, H, MURAKAMI, Y, WATANABE, T, SUZUKI, H, YASUDA, Z, IKEDA, N, MITSUI, H, TANI, S
Published in Chemical & pharmaceutical bulletin (1983)
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Published in Chemical & pharmaceutical bulletin (1983)
Journal Article
SUCTION DUCT
SAKAKIBARA, Y, ITO, K, KOMORI, T, HATTORI, M, YASUDA, Z, HIROSE, Y, ISHIHARA, H, FUJIHARA, K, KINO, H
Year of Publication 16.04.2003
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Year of Publication 16.04.2003
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