Novel Rinse Material to Improve EUV Lithography Performance
Yamamoto, Kazuma, Matsuura, Yuriko, Yashima, Tomoyasu, Nagahara, Tatsuro
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
Double-layered thin collector in n-type metal-base organic transistors
Ueno, Yohei, Yashima, Tomoyasu, Hirata, Naoki, Oguma, Naomi, Kido, Junji, Nakayama, Ken-ichi
Published in Japanese Journal of Applied Physics (01.01.2014)
Published in Japanese Journal of Applied Physics (01.01.2014)
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Journal Article
SEMICONDUCTOR WATER-SOLUBLE COMPOSITION, AND USE THEREOF
YAMAMOTO KAZUMA, SEKITO TAKASHI, YASHIMA TOMOYASU, ISHII MAKI, NAGAHARA TATSURO
Year of Publication 16.08.2018
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Year of Publication 16.08.2018
Patent
SEMICONDUCTOR AQUEOUS COMPOSITION AND USE OF THE SAME
YAMAMOTO, Kazuma, YASHIMA, Tomoyasu, ISHII, Maki, SEKITO, Takashi, NAGAHARA, Tatsuro
Year of Publication 11.12.2019
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Year of Publication 11.12.2019
Patent
Rinse composition, a method for forming resist patterns and a method for making semiconductor devices
Yashima, Tomoyasu, Yamamoto, Kazuma, Nagahara, Tatsuro, Matsuura, Yuriko
Year of Publication 22.10.2019
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Year of Publication 22.10.2019
Patent