Investigation of rapid-thermal-processing-induced defects in ion-implanted Czochralski silicon by the magic mirror method
Hahn, S, Kugimiya, K, Yarling, C B, Suga, H, Smith, W L, Blaustein, P R, Takahashi, K
Published in Semiconductor science and technology (01.01.1992)
Published in Semiconductor science and technology (01.01.1992)
Get full text
Journal Article