Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices
Park, Jangryul, Choi, Youngsun, Kwon, Soonyang, Lee, Youngjun, Kim, Jiwoong, Kim, Jae-Joon, Lee, Jihye, Ahn, Jeongho, Kwak, Hidong, Yang, Yusin, Jo, Taeyong, Lee, Myungjun, Kim, Kwangrak
Published in Light, science & applications (28.05.2024)
Published in Light, science & applications (28.05.2024)
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Fourier ptychographic topography
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Published in Optics express (27.03.2023)
Published in Optics express (27.03.2023)
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The Development of the Non-contact Electrical Leakage Property Measurement System for the High-K Dielectric Materials on DRAM Capacitors
Yusin Yang, Byung Sug Lee, Misung Lee, Chung Sam Jun, Tae Sung Kim
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding
Fast, exact, and non-destructive diagnoses of contact failures in nano-scale semiconductor device using conductive AFM
Shin, ChaeHo, Kim, Kyongjun, Kim, JeongHoi, Ko, Wooseok, Yang, Yusin, Lee, SangKil, Jun, Chung Sam, Kim, Youn Sang
Published in Scientific reports (28.06.2013)
Published in Scientific reports (28.06.2013)
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Journal Article
METHOD AND SYSTEM FOR INSPECING SEMICONDUTOR WAFER AND METHOD OF FORMING SEMICONDUCTOR DEVICE USING THE SAME
KIM SOUK, SOHN YOUNGHOON, RYU SUNG YOON, SONG JOONSEO, YANG YUSIN, LEE CHIHOON
Year of Publication 15.06.2020
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Year of Publication 15.06.2020
Patent
In-fab assessment of heat budget in 3D NAND flash devices using terahertz wave-based metrology system
Baek, Inkeun, Ryu, SungYoon, Jeon, Ikseon, Jang, Yoonkyung, Park, Suhwan, Choi, Eun Hyuk, Kim, Wontae, Priwisch, Martin, Kim, Taejoong, Lee, Myungjun, Yang, Yusin
Published in 2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) (17.09.2023)
Published in 2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) (17.09.2023)
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Conference Proceeding