Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data
Yang, Yu-Pu, Lu, Te-Yun, Lo, Hsiao-Han, Chen, Wei-Lun, Wang, Peter J., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in Materials (08.08.2021)
Published in Materials (08.08.2021)
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Journal Article
Minimizing film residual stress with in situ OES big data using principal component analysis of deposited AlN films by pulsed DC reactive sputtering
Lu, Te-Yun, Yang, Yu-Pu, Lo, Hsiao-Han, Wang, Peter J., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in International journal of advanced manufacturing technology (01.06.2021)
Published in International journal of advanced manufacturing technology (01.06.2021)
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Journal Article
Coordinated Control of Multi-Agent Systems with a Varying-Velocity Leader and Input Saturation
Ke, Peng, Hou-Sheng, Su, Yu-Pu, Yang
Published in Communications in theoretical physics (01.09.2009)
Published in Communications in theoretical physics (01.09.2009)
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Journal Article
Lipophilic Magnetic Photonic Nanochains for Practical Anticounterfeiting
Li, Gang, Luo, Wei, Che, Zhiyuan, Pu, YuYang, Deng, Peng, Shi, Lei, Ma, Huiru, Guan, Jianguo
Published in Small (Weinheim an der Bergstrasse, Germany) (01.05.2022)
Published in Small (Weinheim an der Bergstrasse, Germany) (01.05.2022)
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Journal Article
Guaranteed cost output feedback control design of discrete-time uncertain fuzzy system
Zhong Yang, Yu-pu Yang, Wei Li
Published in 2008 7th World Congress on Intelligent Control and Automation (01.06.2008)
Published in 2008 7th World Congress on Intelligent Control and Automation (01.06.2008)
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Conference Proceeding
Minimizing residual stress of aluminum nitride (AlN) thin films using multi-step deposition of DC pulsed sputtering
Chen, Wei-Lun, Yang, Shang Shian, Yuan, Ning Hsiu, Zhou, Wei Yu, Yang, Yu-Pu, Lo, Hsiao-Han, Wang, Peter J., Lai, Walter, Fuh, Yiin-kuen, Li, Tomi T.
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
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Conference Proceeding
Predicting residual stress of aluminum nitride thin-film by incorporating manifold learning and tree-based ensemble classifier
Chen, Hsuan-Fan, Yang, Yu-Pu, Chen, Wei-Lun, Wang, Peter J., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in Materials chemistry and physics (01.02.2023)
Published in Materials chemistry and physics (01.02.2023)
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Journal Article
Double-closed-loop fuzzy controlled active power filter
Yin, Zhi-Zhu, Yang, Yu-Pu, Dong, Zu-Yi, Xu, Lin, Zhou, Li-Dan, Yao, Gang
Published in Dianli Xitong Baohu yu Kongzhi (16.02.2010)
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Published in Dianli Xitong Baohu yu Kongzhi (16.02.2010)
Journal Article
Optimization on Deposition of Aluminum Nitride by Pulsed Direct Current Reactive Magnetron Sputtering
Yang, Yu-Pu, Lu, Te-Yun, Wang, Song-Ho, Chang, Hsueh-Er, Wang, Peter j., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
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Conference Proceeding
CCA2 secure biometric identity based encryption with constant-size ciphertext
Yang, Yang, Hu, Yu-pu, Zhang, Le-you, Sun, Chun-hui
Published in Frontiers of information technology & electronic engineering (01.10.2011)
Published in Frontiers of information technology & electronic engineering (01.10.2011)
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Journal Article
Improved particle filter for passive target tracking
Deng, Xiao-long, Xie, Jian-ying, Yang, Yu-pu
Published in Journal of Shanghai University (01.12.2005)
Published in Journal of Shanghai University (01.12.2005)
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Journal Article