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System and method of determining a polishing endpoint by monitoring signal intensity

System and method of determining a polishing endpoint by monitoring signal intensity

by Crevasse, Annette M, Easter, William G, Miceli, Frank, Yang, Yifeng Winston
Year of Publication 04.05.2004

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Patent

System and method of determining a polishing endpoint by monitoring signal intensity

System and method of determining a polishing endpoint by monitoring signal intensity

by MICELI FRANK, EASTER WILLIAM G, CREVASSE ANNETTE M, YANG YIFENG WINSTON
Year of Publication 04.05.2004

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Patent

System and method of determining a polishing endpoint by monitoring signal intensity

System and method of determining a polishing endpoint by monitoring signal intensity

by MICELI FRANK, EASTER WILLIAM G, CREVASSE ANNETTE M, YANG YIFENG WINSTON
Year of Publication 01.05.2003

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Patent