Sequential Design of PEALD In-Ga-Zn-O Active Layer for Enhancing TFT Stability
Yang, Hae Lin, Kim, Yoon-Seo, Hwang, Taewon, Kamimura, Sunao, Eizawa, Aya, Teramoto, Takashi, Dussarrat, Christian, Ono, Takashi, Park, Jin-Seong
Published in IEEE transactions on electron devices (01.12.2023)
Published in IEEE transactions on electron devices (01.12.2023)
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Journal Article
Investigation of silicon nitride for spacer via plasma-enhanced atomic layer deposition using a (tert-butylamino)dimethylsilane precursor
Park, Chae-Yeon, Lin Yang, Hae, Kim, Hye-Mi, Kim, Daejung, Park, Yongjoo, Park, Jongruyl, Shin, Seokhee, Park, Jin-Seong
Published in Applied surface science (15.10.2024)
Published in Applied surface science (15.10.2024)
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Journal Article
Boosted growth rate using discrete reactant feeding method and novel precursor of indium oxide by atomic layer deposition
Lin Yang, Hae, Kim, Hye-Mi, KAMIMURA, Sunao, EIZAWA, Aya, TERAMOTO, Takashi, DUSSARRAT, Christian, ONO, Takashi, Park, Jin-Seong
Published in Applied surface science (01.05.2024)
Published in Applied surface science (01.05.2024)
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Journal Article
Water vapor and hydrogen gas diffusion barrier characteristics of Al2O3–alucone multi-layer structures for flexible OLED display applications
Han, Ju-Hwan, Kim, Tae-Yeon, Kim, Dong-Yeon, Yang, Hae Lin, Park, Jin-Seong
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
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Journal Article
Unveiling growth mechanisms of PEALD In2O3 thin films with amide-based versus alkyl-based novel indium precursors
Jeong, Gyeong Min, Hae Lin Yang, Yoon, Ara, Yoon-Seo, Kim, Lee, Sangick, Kwone, Yonghee, Jeon, Sangyong, Im, Youngjae, Jin-Seong, Park
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
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Journal Article
Thermally Annealed Molecular Layer‐Deposited Indicone: Structural Analysis and Area Selective Deposition Application
Lee, Seunghwan, Baek, GeonHo, Yang, Hae Lin, Ngoc Van, Tran Thi, Kim, Seung‐Woo, Kim, Young‐Kwan, Shong, Bonggeun, Park, Jin‐Seong
Published in Advanced materials interfaces (01.11.2022)
Published in Advanced materials interfaces (01.11.2022)
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Journal Article
Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinol
Park, Gi-Beom, Yang, Hae Lin, Kim, Ji Min, Jung, Hyolim, Baek, GeonHo, Park, Chang-Kyun, Park, Jin-Seong
Published in Nanotechnology (18.07.2024)
Published in Nanotechnology (18.07.2024)
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Journal Article
Water vapor and hydrogen gas diffusion barrier characteristics of Al 2 O 3 –alucone multi-layer structures for flexible OLED display applications
Han, Ju-Hwan, Kim, Tae-Yeon, Kim, Dong-Yeon, Yang, Hae Lin, Park, Jin-Seong
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
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Journal Article
A Route to MoO2 film fabrication via atomic layer deposition using Mo(IV) precursor and oxygen reactant for DRAM applications
Yoon, Ara, Yang, Hae Lin, Lee, Sanghoon, Lee, Seunghwan, Kim, Beomseok, Jung, Changhwa, Lim, Hanjin, Park, Jin-Seong
Published in Ceramics international (15.04.2024)
Published in Ceramics international (15.04.2024)
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Journal Article
Atomic-Layer-Deposited SiOx/SnOx Nanolaminate Structure for Moisture and Hydrogen Gas Diffusion Barriers
Han, Ju-Hwan, Lee, Seong-Hyeon, Jeong, Seok-Goo, Kim, Dong-Yeon, Yang, Hae Lin, Lee, Seunghwan, Yoo, Seung Yeon, Park, Inho, Park, Ho Bum, Lim, Kwang-Su, Yang, Won-Jae, Choi, Hyun-Chul, Park, Jin-Seong
Published in ACS applied materials & interfaces (25.08.2021)
Published in ACS applied materials & interfaces (25.08.2021)
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Journal Article
A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon–tin oxide by atomic layer deposition
Han, Ju-Hwan, Kim, Dong-Yeon, Lee, Seunghwan, Yang, Hae Lin, Park, Byung Ho, Park, Jin-Seong
Published in Ceramics international (15.12.2021)
Published in Ceramics international (15.12.2021)
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Journal Article
Atomic-Layer-Deposited SiO x /SnO x Nanolaminate Structure for Moisture and Hydrogen Gas Diffusion Barriers
Han, Ju-Hwan, Lee, Seong-Hyeon, Jeong, Seok-Goo, Kim, Dong-Yeon, Yang, Hae Lin, Lee, Seunghwan, Yoo, Seung Yeon, Park, Inho, Park, Ho Bum, Lim, Kwang-Su, Yang, Won-Jae, Choi, Hyun-Chul, Park, Jin-Seong
Published in ACS applied materials & interfaces (25.08.2021)
Published in ACS applied materials & interfaces (25.08.2021)
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Journal Article
Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma
Yang, Hae Lin, Kim, Tae-Yeon, Park, Gi-Beom, Yoon, Ara, Song, Ki-cheol, Lee, Yeonhee, Park, Jongryul, Kang, Taehyeong, Park, Yongjoo, Park, Jin-Seong
Published in Materials science in semiconductor processing (01.09.2023)
Published in Materials science in semiconductor processing (01.09.2023)
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Journal Article
Unveiling growth mechanisms of PEALD In 2 O 3 thin films with amide-based versus alkyl-based novel indium precursors
Jeong, Gyeong Min, Yang, Hae Lin, Yoon, Ara, Kim, Yoon-Seo, Lee, Sangick, Kwone, Yonghee, Jeon, Sangyong, Im, Youngjae, Park, Jin-Seong
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
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Journal Article
Unveiling growth mechanisms of PEALD InO thin films with amide-based alkyl-based novel indium precursors
Jeong, Gyeong Min, Yang, Hae Lin, Yoon, Ara, Kim, Yoon-Seo, Lee, Sangick, Kwone, Yonghee, Jeon, Sangyong, Im, Youngjae, Park, Jin-Seong
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (18.07.2024)
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Journal Article
Water vapor and hydrogen gas diffusion barrier characteristics of AlO-alucone multi-layer structures for flexible OLED display applications
Han, Ju-Hwan, Kim, Tae-Yeon, Kim, Dong-Yeon, Yang, Hae Lin, Park, Jin-Seong
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (09.11.2021)
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Journal Article