Soak on NiSi: Selective Formation of Pure Sub-Nanometer NiTi to Reduce Contact Resistance
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Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
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Year of Publication 20.06.2016
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MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS
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Year of Publication 11.10.2012
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MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS
SAITOU TETSUYA, YAMAMOTO HIROHIKO, NAGAOKA HIDEKI, MURAOKA TAKASHI, KAWASAKI HIROO
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Year of Publication 07.07.2011
Patent
Spike Annealing as Second Rapid Thermal Annealing to Prevent Pure Nickel Silicide From Decomposing on a Gate
Futase, T., Hashikawa, N., Kamino, T., Fujiwara, T., Inaba, Y., Suzuki, T., Yamamoto, H.
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
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Journal Article
Conference Proceeding
Pattern-independent, fine-morphology Ni-Pt silicide formation by partial conversion with low metal-consumption ratio
Futase, T, Kamino, T, Hashikawa, N, Inaba, Y, Fujiwara, T, Yamamoto, H, Tanimoto, H
Published in 2010 IEEE International Reliability Physics Symposium (01.05.2010)
Published in 2010 IEEE International Reliability Physics Symposium (01.05.2010)
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Conference Proceeding
Disconnection of NiSi shared contact and its correction using NH3 soak treatment in Ti/TiN barrier metallization
Futase, T, Funayama, K, Hashikawa, N, Tobimatsu, H, Yamamoto, H, Tanimoto, H
Published in 2010 IEEE International Reliability Physics Symposium (01.05.2010)
Published in 2010 IEEE International Reliability Physics Symposium (01.05.2010)
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Conference Proceeding
Improving electrical properties of pure nickel silicide by employing spike anneal as the second rapid thermal anneal
Futase, T., Hashikawa, N., Kamino, T., Inaba, Y., Fujiwara, T., Suzuki, T., Yamamoto, H.
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
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Conference Proceeding
Petroleum Geology of the Northern Oman
KUSHIRO, Tashio, YAMAMOTO, Hirohiko
Published in Journal of the Japanese Association for Petroleum Technology (1989)
Published in Journal of the Japanese Association for Petroleum Technology (1989)
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Journal Article
Enhancing electrical properties of nickel silicide by using spike anneal as the second rapid thermal anneal
Futase, Takuya, Okada, Shigenari, Hashikawa, Naoto, Kamino, Takeshi, Inaba, Yutaka, Fujiwara, Tetsuo, Suzuki, Tadashi, Yamamoto, Hirohiko, Kozawa, Hidehiko
Published in 2008 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2008)
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Published in 2008 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2008)
Conference Proceeding