Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
Dolgov, A, Lopaev, D, Rachimova, T, Kovalev, A, Vasil'eva, A, Lee, C J, Krivtsun, V M, Yakushev, O, Bijkerk, F
Published in Journal of physics. D, Applied physics (12.02.2014)
Published in Journal of physics. D, Applied physics (12.02.2014)
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Journal Article
Comparison of H 2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
Dolgov, A, Lopaev, D, Rachimova, T, Kovalev, A, Vasil'eva, A, Lee, C J, Krivtsun, V M, Yakushev, O, Bijkerk, F
Published in Journal of physics. D, Applied physics (12.02.2014)
Published in Journal of physics. D, Applied physics (12.02.2014)
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Journal Article
Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes
Dolgov, A, Yakushev, O, Abrikosov, A, Snegirev, E, Krivtsun, V M, Lee, C J, Bijkerk, F
Published in Plasma sources science & technology (01.05.2015)
Published in Plasma sources science & technology (01.05.2015)
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Journal Article
The laser plasma of TAC targets with Cu inclusions
Fronya, A A, Borisenko, N G, Puzyrev, V N, Sahakyan, A T, Starodub, A N, Yakushev, O F
Published in Journal of physics. Conference series (01.03.2019)
Published in Journal of physics. Conference series (01.03.2019)
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Dynamics of the ion energy spectrum in EUV-induced hydrogen plasma
Abrikosov, A. A., Yakushev, O. F., Lopaev, D. V., Krivtsun, V. M.
Published in Plasma physics reports (01.06.2017)
Published in Plasma physics reports (01.06.2017)
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Journal Article
Experimental Study of Laser Plasma of Low-Density Volume-Structured Targets
Fronya, A. A., Borisenko, N. G., Sahakyan, A. T., Puzyrev, V. N., Starodub, A. N., Yakushev, O. F.
Published in Physics of atomic nuclei (01.12.2019)
Published in Physics of atomic nuclei (01.12.2019)
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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences)
Abramenko, D B, Antsiferov, P S, Astakhov, D I, Vinokhodov, A Yu, Vichev, I Yu, Gayazov, R R, Grushin, A S, Dorokhin, L A, Ivanov, V V, Kim, D A, Koshelev, K N, Krainov, P V, Krivokorytov, M S, Krivtsun, V M, Lakatosh, B V, Lash, A A, Medvedev, V V, Ryabtsev, A N, Sidelnikov, Yu V, Snegirev, E P, Solomyannaya, A D, Spiridonov, M V, Tsygvintsev, I P, Yakushev, O F, Yakushkin, A A
Published in Physics Uspekhi (01.03.2019)
Published in Physics Uspekhi (01.03.2019)
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Soft X-ray and EUV emission spectra of beryllium plasma produced by neodymium-glass laser radiation with broad frequency and angular spectra
Sahakyan, A.T., Andreev, S.N., Kologrivov, A.A., Kondratenko, T.T., Puzyrev, V.N., Starodub, A.N., Tolstikhina, I.Yu, Fronya, A.A., Yakushev, O.F.
Published in Quantum electronics (Woodbury, N.Y.) (01.06.2020)
Published in Quantum electronics (Woodbury, N.Y.) (01.06.2020)
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The image of a nanosecond laser plasma in its own optical radiation
Fronya, A A., Borisenko, N G, Puzyrev, V N, Sahakyan, A T, Starodub, A N, Yakushev, O F
Published in Journal of physics. Conference series (01.12.2017)
Published in Journal of physics. Conference series (01.12.2017)
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Journal Article
Single-walled carbon nanotube membranes for optical applications in the extreme ultraviolet range
Gubarev, V.M., Yakovlev, V.Y., Sertsu, M.G., Yakushev, O.F., Krivtsun, V.M., Gladush, Yu.G., Ostanin, I.A., Sokolov, A., Schäfers, F., Medvedev, V.V., Nasibulin, A.G.
Published in Carbon (New York) (01.12.2019)
Published in Carbon (New York) (01.12.2019)
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A Magnetohydrodynamic System for Pumping Liquid Metal Media in a Plasma Source of Extreme Ultraviolet Radiation
Vinokhodov, A. Yu, Yakushkin, A. A., Yakushev, O. F., Krivokorytov, M. S., Krivtsun, V. N., Medvedev, V. V., Lash, A. A., Koshelev, K. N.
Published in Instruments and experimental techniques (New York) (01.04.2019)
Published in Instruments and experimental techniques (New York) (01.04.2019)
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