A global plasma and surface model of hydrogen/methane inductively coupled discharge to analyze hydrocarbon plasma–surface interactions in extreme-ultraviolet lithography machines
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Published in Journal of applied physics (28.07.2024)
Published in Journal of applied physics (28.07.2024)
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EUV-induced hydrogen plasma and particle release
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Published in Radiation effects and defects in solids (03.06.2022)
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Spectral properties of La/B--based multilayer mirrors near the boron K absorption edge
Makhotkin, Igor A, Zoethout, Erwin, Louis, Eric, Yakunin, Andrei M, Müllender, Stephan, Bijkerk, Fred
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Published in Optics express (21.05.2012)
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Growth and characterization of In1-xMnxAs diluted magnetic semiconductors quantum dots
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Published in Journal of crystal growth (15.06.2005)
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Plasma-assisted Discharges and Charging in EUV-induced Plasma
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Published in arXiv.org (05.12.2020)
Published in arXiv.org (05.12.2020)
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EUV-induced Hydrogen Plasma : Pulsed Mode Operation and Confinement in Scanner
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Published in arXiv.org (20.05.2021)
Published in arXiv.org (20.05.2021)
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Journal Article
Growth and characterization of Ini,Mn,As diluted magnetic semiconductors quantum dots
Primus, Jean-Louis, Choi, Kang-Hoon, Trampert, Achim, Yakunin, Andrei M, Ferre, Jacques, Wolter, Joachim H, Van Roy, Willem, De Boeck, Jo
Published in Journal of crystal growth (15.06.2005)
Published in Journal of crystal growth (15.06.2005)
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Journal Article
Growth and characterization of In 1− x Mn x As diluted magnetic semiconductors quantum dots
Primus, Jean-Louis, Choi, Kang-Hoon, Trampert, Achim, Yakunin, Andrei M., Ferré, Jacques, Wolter, Joachim H., Van Roy, Willem, De Boeck, Jo
Published in Journal of crystal growth (2005)
Published in Journal of crystal growth (2005)
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Apparatus including electrostatic chuck and method for operating apparatus
NIKIPELOV ANDREY, YAKUNIN ANDREI M, VAN DUIVENBODE JEROEN, VAN DE KERKHOF MARCUS A, CLOIN CHRISTIAN G N H M
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
Patent
Extreme UV-projection illumination system for microlithographic imaging, has spectral filter detachably arranged in spectral aperture and/or aperture diaphragm and transparent for extreme UV-radiation
DENGEL, GUENTHER, BANINE, VADIM YEVGENYEVICH, YAKUNIN, ANDREI M, EHM, DIRK HEINRICH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 04.03.2010
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Year of Publication 04.03.2010
Patent
SPIEGEL FÜR BEUV-LICHT
KRIVTSUN, VLADIMIR, MEDVEDEV, VYACHESLAV, BIJKERK, FREDERIK, YAKSHIN, ANDREY E, YAKUNIN, ANDREI M
Year of Publication 11.12.2014
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Year of Publication 11.12.2014
Patent