In situ and real‐time monitoring of structure formation during non‐reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride
Krause, Bärbel, Kuznetsov, Dmitry S., Yakshin, Andrey E., Ibrahimkutty, Shyjumon, Baumbach, Tilo, Bijkerk, Fred
Published in Journal of applied crystallography (01.08.2018)
Published in Journal of applied crystallography (01.08.2018)
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Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors
Bosgra, Jeroen, Zoethout, Erwin, van der Eerden, Ad M J, Verhoeven, Jan, van de Kruijs, Robbert W E, Yakshin, Andrey E, Bijkerk, Fred
Published in Applied optics. Optical technology and biomedical optics (20.12.2012)
Published in Applied optics. Optical technology and biomedical optics (20.12.2012)
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Examining the influence of W thickness on the Si-on-W Interface: A comparative metrology analysis
Valpreda, Adele, Sturm, Jacobus M., Yakshin, Andrey E., Woitok, Joachim, Lokhorst, Hendrik W., Phadke, Parikshit, Ackermann, Marcelo
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Published in Applied surface science (15.10.2024)
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Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics
Huang, Qiushi, Medvedev, Viacheslav, van de Kruijs, Robbert, Yakshin, Andrey, Louis, Eric, Bijkerk, Fred
Published in Applied Physics Reviews (01.03.2017)
Published in Applied Physics Reviews (01.03.2017)
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Double matrix effect in Low Energy Ion Scattering from La surfaces
Zameshin, Andrey A., Yakshin, Andrey E., Sturm, Jacobus M., Brongerma, Hidde H., Bijkerk, Fred
Published in Applied surface science (15.05.2018)
Published in Applied surface science (15.05.2018)
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Hysteresis, Loss and Nonlinearity in Epitaxial PbZr 0.55 Ti 0.45 O 3 Films: A Polarization Rotation Model
Lucke, Philip, Bayraktar, Muharrem, Birkhölzer, Yorick A., Nematollahi, Mohammadreza, Yakshin, Andrey, Rijnders, Guus, Bijkerk, Fred, Houwman, Evert P.
Published in Advanced functional materials (01.12.2020)
Published in Advanced functional materials (01.12.2020)
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Journal Article
Hysteresis, Loss and Nonlinearity in Epitaxial PbZr0.55Ti0.45O3 Films: A Polarization Rotation Model
Lucke, Philip, Bayraktar, Muharrem, Birkhölzer, Yorick A., Nematollahi, Mohammadreza, Yakshin, Andrey, Rijnders, Guus, Bijkerk, Fred, Houwman, Evert P.
Published in Advanced functional materials (01.12.2020)
Published in Advanced functional materials (01.12.2020)
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Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers
Abdali, Salim, Gerward, Leif, Yakshin, Andrey E., Louis, Eric, Bijkerk, Fred
Published in Materials research bulletin (01.02.2002)
Published in Materials research bulletin (01.02.2002)
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Journal Article
Reconstruction of interfaces of periodic multilayers from X-ray reflectivity using a free-form approach
Zameshin, Andrey, Makhotkin, Igor A., Yakunin, Sergey N., van de Kruijs, Robbert W. E., Yakshin, Andrey E., Bijkerk, Fred
Published in Journal of applied crystallography (01.08.2016)
Published in Journal of applied crystallography (01.08.2016)
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Journal Article
Influence of DC Bias on the Hysteresis, Loss, and Nonlinearity of Epitaxial PbZr0.55Ti0.45O3 Films
Lucke, Philip, Bayraktar, Muharrem, Schukkink, Niels, Yakshin, Andrey E., Rijnders, Guus, Bijkerk, Fred, Houwman, Evert P.
Published in Advanced electronic materials (01.08.2021)
Published in Advanced electronic materials (01.08.2021)
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Journal Article
Influence of DC Bias on the Hysteresis, Loss, and Nonlinearity of Epitaxial PbZr 0.55 Ti 0.45 O 3 Films
Lucke, Philip, Bayraktar, Muharrem, Schukkink, Niels, Yakshin, Andrey E., Rijnders, Guus, Bijkerk, Fred, Houwman, Evert P.
Published in Advanced electronic materials (01.08.2021)
Published in Advanced electronic materials (01.08.2021)
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Resolving buried interfaces with Low Energy Ion Scattering
Valpreda, Adele, Sturm, Jacobus M, Yakshin, Andrey, Ackermann, Marcelo
Published in arXiv.org (27.04.2023)
Published in arXiv.org (27.04.2023)
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Paper
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OPTICAL ELEMENT COMPRISING A MULTILAYER COATING, AND OPTICAL ARRANGEMENT COMPRISING SAME
VAN DE KRUIJS ROBBERT W. E, NYABERO STEVEN, BIJKERK FREDERIK, YAKSHIN ANDREY E
Year of Publication 08.01.2016
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Year of Publication 08.01.2016
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Molecular contamination mitigation in EUVL by environmental control
Koster, Norbert, Mertens, Bas, Jansen, Rik, van de Runstraat, Annemieke, Stietz, Frank, Wedowski, Marco, Meiling, Hans, Klein, Roman, Gottwald, Alexander, Scholze, Frank, Visser, Matthieu, Kurt, Ralph, Zalm, Peer, Louis, Eric, Yakshin, Andrey
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Conference Proceeding
Limits of surface analysis of thin film compounds using LEIS
Zameshin, Andrey A, Yakshin, Andrey E, Sturm, Jacobus M, Boas, Cristiane Stilhano Vilas, Bijkerk, Fred
Year of Publication 06.09.2018
Year of Publication 06.09.2018
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Journal Article
REFLECTIVE OPTICAL ELEMENT
Kuznetsov, Dmitry, Enkisch, Hartmut, Bijkerk, Frederik, Yakshin, Andrey E, Medvedev, Viacheslav
Year of Publication 23.01.2020
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Year of Publication 23.01.2020
Patent