Nanometer interface and materials control for multilayer EUV-optical applications
Louis, E., Yakshin, A.E., Tsarfati, T., Bijkerk, F.
Published in Progress in surface science (01.12.2011)
Published in Progress in surface science (01.12.2011)
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W/B short period multilayer structures for soft x-rays
Medvedev, R. V., Zameshin, A. A., Sturm, J. M., Yakshin, A. E., Bijkerk, F.
Published in AIP advances (01.04.2020)
Published in AIP advances (01.04.2020)
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Interactions of C in layered Mo–Si structures
Bosgra, J., Veldhuizen, L.W., Zoethout, E., Verhoeven, J., Loch, R.A., Yakshin, A.E., Bijkerk, F.
Published in Thin solid films (02.09.2013)
Published in Thin solid films (02.09.2013)
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Journal Article
Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation
Kuznetsov, D. S., Yakshin, A. E., Sturm, J. M., van de Kruijs, R. W. E., Bijkerk, F.
Published in AIP advances (01.11.2016)
Published in AIP advances (01.11.2016)
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Journal Article
Growth and optical performance of short-period W/Al and polished W/Si/Al/Si multilayers
IJpes, D., Yakshin, A. E., Sturm, J. M., Ackermann, M.
Published in Journal of applied physics (21.10.2023)
Published in Journal of applied physics (21.10.2023)
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Journal Article
In-situ study of the diffusion-reaction mechanism in Mo/Si multilayered films
Bruijn, S., van de Kruijs, R.W.E., Yakshin, A.E., Bijkerk, F.
Published in Applied surface science (15.01.2011)
Published in Applied surface science (15.01.2011)
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Journal Article
Interface smoothing in short-period W/B4C multilayers using neon ion beam polishing
IJpes, D., Yakshin, A. E., Sturm, J. M., Ackermann, M. D.
Published in Journal of applied physics (28.12.2023)
Published in Journal of applied physics (28.12.2023)
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Journal Article
Non-constant diffusion characteristics of nanoscopic Mo–Si interlayer growth
Bosgra, J., Verhoeven, J., van de Kruijs, R.W.E., Yakshin, A.E., Bijkerk, F.
Published in Thin solid films (01.11.2012)
Published in Thin solid films (01.11.2012)
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Journal Article
Increasing soft x-ray reflectance of short-period W/Si multilayers using B4C diffusion barriers
IJpes, D., Yakshin, A. E., Sturm, J. M., Ackermann, M. D.
Published in Journal of applied physics (14.01.2023)
Published in Journal of applied physics (14.01.2023)
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Journal Article
Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures
Bruijn, S., van de Kruijs, R.W.E., Yakshin, A.E., Zoethout, E., Bijkerk, F.
Published in Surface & coatings technology (25.12.2010)
Published in Surface & coatings technology (25.12.2010)
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Journal Article
Spectral-purity-enhancing layer for multilayer mirrors
van Herpen, M M J W, van de Kruijs, R W E, Klunder, D J W, Louis, E, Yakshin, A E, van der Westen, S Alonso, Bijkerk, F, Banine, V
Published in Optics letters (15.03.2008)
Published in Optics letters (15.03.2008)
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Journal Article
Nano-size crystallites in Mo/Si multilayer optics
van de Kruijs, R.W.E., Zoethout, E., Yakshin, A.E., Nedelcu, I., Louis, E., Enkisch, H., Sipos, G., Müllender, S., Bijkerk, F.
Published in Thin solid films (25.10.2006)
Published in Thin solid films (25.10.2006)
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Journal Article
Conference Proceeding
Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures
Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., IJpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E., Bijkerk, F.
Published in Journal of applied physics (28.07.2019)
Published in Journal of applied physics (28.07.2019)
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Journal Article
Interface roughness in Mo/Si multilayers
Nedelcu, I., van de Kruijs, R.W.E., Yakshin, A.E., Tichelaar, F., Zoethout, E., Louis, E., Enkisch, H., Muellender, S., Bijkerk, F.
Published in Thin solid films (25.10.2006)
Published in Thin solid films (25.10.2006)
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Journal Article
Conference Proceeding
High-reflectance La/B-based multilayer mirror for 6.x nm wavelength
Kuznetsov, D S, Yakshin, A E, Sturm, J M, van de Kruijs, R W E, Louis, E, Bijkerk, F
Published in Optics letters (15.08.2015)
Published in Optics letters (15.08.2015)
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