MOCVD growth and characterization of vanadium dioxide films
Yakovkina, L. V., Mutilin, S. V., Prinz, V. Ya, Smirnova, T. P., Shayapov, V. R., Korol’kov, I. V., Maksimovsky, E. A., Volchok, N. D.
Published in Journal of materials science (01.04.2017)
Published in Journal of materials science (01.04.2017)
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Journal Article
CRYSTAL TEXTURE AND MECHANICAL STRESSES IN VO2 FILMS OBTAINED BY MOCVD
Shayapov, V. R., Kichai, V. N., Yakovkina, L. V., Korolkov, I. V.
Published in Journal of structural chemistry (01.02.2022)
Published in Journal of structural chemistry (01.02.2022)
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Journal Article
Synthesis and properties of dielectric (HfO2)1 − x(Sc2O3)x films
Yakovkina, L. V., Smirnova, T. P., Borisov, V. O., Kichai, V. N., Kaichev, V. V.
Published in Inorganic materials (01.02.2013)
Published in Inorganic materials (01.02.2013)
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Journal Article
SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors
Smirnova, T.P., Badalian, A.M., Yakovkina, L.V., Kaichev, V.V., Bukhtiyarov, V.I., Shmakov, A.N., Asanov, I.P., Rachlin, V.I., Fomina, A.N.
Published in Thin solid films (01.04.2003)
Published in Thin solid films (01.04.2003)
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Journal Article
Phase composition of nanosized oxide film structures based on lanthanum and scandium doped HfO2
Smirnova, T. P., Yakovkina, L. V., Borisov, V. O., Lebedev, M. S.
Published in Journal of structural chemistry (01.12.2017)
Published in Journal of structural chemistry (01.12.2017)
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Journal Article
Composition and structure of hafnia films on silicon
Smirnova, T. P., Kaichev, V. V., Yakovkina, L. V., Kosyakov, V. I., Beloshapkin, S. A., Kuznetsov, F. A., Lebedev, M. S., Gritsenko, V. A.
Published in Inorganic materials (01.09.2008)
Published in Inorganic materials (01.09.2008)
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Journal Article
Selective growth of vanadium dioxide on patterned Al/SiO 2 substrates by metal–organic chemical vapor deposition
Bagochus, E. K., Mutilin, S. V., Kichay, V. N., Yakovkina, L. V.
Published in CrystEngComm (18.09.2024)
Published in CrystEngComm (18.09.2024)
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Journal Article
Preparation and Properties of Thin HfO2 Films
Yakovkina, L. V., Kichai, V. N., Smirnova, T. P., Kaichev, V. V., Shubin, Yu. V., Morozova, N. B., Zherikova, K. V., Igumenov, I. K.
Published in Inorganic materials (01.12.2005)
Published in Inorganic materials (01.12.2005)
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Journal Article
Structure, chemistry and luminescence properties of dielectric LaxHf1-xOy films
Kaichev, V.V., Smirnova, T.P., Yakovkina, L.V., Ivanova, E.V., Zamoryanskaya, M.V., Saraev, A.A., Pustovarov, V.A., Perevalov, T.V., Gritsenko, V.A.
Published in Materials chemistry and physics (01.06.2016)
Published in Materials chemistry and physics (01.06.2016)
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Journal Article
Excited helium-induced CVD of a-Si1−xCx:H films from trimethylchlorosilane
Smirnova, T.P., Yakovkina, L.V., Ayupov, B.M, Dolgpvesova, I.P., Nadolinny, V.A., Kitchay, V.N.
Published in Thin solid films (29.09.1999)
Published in Thin solid films (29.09.1999)
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