KrF excimer treatment of aluminium nitride
Yaghdjian, L., Meja, P., Autric, M.
Published in Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505) (2000)
Published in Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505) (2000)
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Conference Proceeding
KrF Excimer Laser Induced Modifications of Aluminum Nitride Ceramic Materials
Autric, M., Yaghdjian, L., Vacquier, G., Nicolas, G.
Published in CLEO/Europe Conference on Lasers and Electro-Optics (1998)
Published in CLEO/Europe Conference on Lasers and Electro-Optics (1998)
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Conference Proceeding