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Surface Smoothing Mechanism of AlN Film by Initially Alternating Supply of Ammonia
by
Yan, Fawang
,
Tsukihara, Masashi
,
Nakamura, Akihiro
,
Yadani
,
Takayuki
,
Fukumoto, Tetsuya
,
Naoi, Yoshiki
,
Sakai, Shiro
Published in
Japanese Journal of Applied Physics
(15.08.2004)
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Interdiffusion induced In(Ga)NAs films growth on GaAs substrates by low-pressure metalorganic chemical vapor deposition
by
Yan, Fawang
,
Naoi, Yoshiki
,
Tsukihara, Masashi
,
Yadani
,
Takayuki
,
Sakai, Shiro
Published in
Journal of crystal growth
(15.08.2005)
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