Showerhead and substrate processing apparatus having the same
LEE GIL JE, WOO RAM, HA YUN GYU, KIM JAE HONG, KIM KI BUM, LEE JU YOUNG
Year of Publication 06.08.2020
Get full text
Year of Publication 06.08.2020
Patent
Showerhead and substrate processing apparatus having the same
LEE, JU-YOUNG, WOO, RAM, KIM, JAE-HONG, KIM, KI-BUM, LEE, GIL-JE, HA, YUN-GYU
Year of Publication 01.08.2020
Get full text
Year of Publication 01.08.2020
Patent