COLUMN STRUCTURE OF THE FACEPLATE
KYE MINJUN, SHIN SEUNGYONG, YUN BYEONG HO, HONG JUN HO, KIM HYUNJOONG, KANG MIN WOOK, JANG KYUNG HO, KIM HYUNGJOON
Year of Publication 03.06.2024
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Year of Publication 03.06.2024
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AlN FACEPLATE COMPRISING AlN AND SHOWERHEAD COMPRISING THE SAME
KYE MINJUN, SHIN SEUNGYONG, YUN BYEONG HO, HONG JUN HO, KIM HYUNJOONG, KANG MIN WOOK, JANG KYUNG HO, KIM HYUNGJOON
Year of Publication 03.06.2024
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Year of Publication 03.06.2024
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METHOD FOR MANUFACTURING FACEPLATE AND METHOD FOR MANUFACTURING SHOWERHEAD
KYE MINJUN, SHIN SEUNGYONG, YUN BYEONG HO, HONG JUN HO, KIM HYUNJOONG, KANG MIN WOOK, JANG KYUNG HO, KIM HYUNGJOON
Year of Publication 03.06.2024
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Year of Publication 03.06.2024
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SUBSTRATE PROCESSING APPARATUS
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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SHOWERHEAD
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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SUBSTRATE PROCESSING APPARATUS
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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SUBSTRATE PROCESSING SYSTEM
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
AN, MYEONG HEON, LEE, SANG SUN, YUN, BYEONG HO, KIM, JIN YOUNG, KIM, JAE WOO
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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LEVEL ADJUSTING APPARATUS OF SUBSTRATE PROCESSING APPARATUS AND LEVEL ADJUSTING METHOD USING THE SAME
JANG, KYUNG HO, YUN, BYEONG HO, CHOI, NAK GU, JUN, SANG HEE, ROH, HEE SUNG
Year of Publication 13.09.2016
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Year of Publication 13.09.2016
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LEVEL ADJUSTING APPARATUS OF SUBSTRATE PROCESSING APPARATUS AND LEVEL ADJUSTING METHOD USING THE SAME
JANG, KYUNG HO, YUN, BYEONG HO, CHOI, NAK GU, JUN, SANG HEE, ROH, HEE SUNG
Year of Publication 13.09.2016
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Year of Publication 13.09.2016
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Level adjusting apparatus of substrate processing apparatus
CHOI NAK GU, YUN BYEONG HO, JUN SANG HEE, JANG KYUNG HO, ROH HEE SUNG
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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