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PROCESS FOR PRODUCING HYDROGEN GAS FROM MIXED GAS CONTAINING HYDROGEN HALIDE, HYDROGEN AND SILICON HALIDE, PROCESS FOR PRODUCING SILICON COMPOUND WITH USE OF THE HYDROGEN GAS, AND PLANT FOR THE PROCESSES
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PROCESS FOR CONTINUOUSLY PRODUCING MONOSILANE
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Reacting device having reacting vessel formed of carbon-containing material, corrosion controlling method of reacting device and producing method of chlorosilanes using reacting device
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Year of Publication 01.10.2010
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