Methods of forming hardmask material film
Kim Min-soo, Lee Won-ki, Yi Song-se, Baek Jae-yeol, Song Hyun-ji, Yu Nae-ry, Kim Myeong-koo, Kim Hyun-woo
Year of Publication 23.01.2018
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Year of Publication 23.01.2018
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Methods of detecting inhomogeneity of a layer and apparatus for performing the same
Ryu Jin-A, Park Jung-Dae, Lee Chang-Ho, Yu Nae-Ry, Kim Jung-Hoon, Jun Pil-Kwon, Kim Dong-Won, Kim Jae-Ho
Year of Publication 27.12.2016
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Year of Publication 27.12.2016
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METHODS OF FORMING HARDMASK MATERIAL FILM
KIM Myeong-koo, YU Nae-ry, KIM Hyun-woo, SONG Hyun-ji, LEE Won-ki, YI Song-se, BAEK Jae-yeol, KIM Min-soo
Year of Publication 04.08.2016
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Year of Publication 04.08.2016
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Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same
KIM DONG-WON, KIM JUNG-HOON, LEE CHANG-HO, YU NAE-RY, PARK JUNG-DAE, RYU JIN-A, KIM JAE-HO, JUN PIL-KWON
Year of Publication 18.09.2014
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Year of Publication 18.09.2014
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Layer structure and method of producing the same, method of forming patterns, and semiconductor device
KIM, YOUNG-MIN, KIM, MIN-SOO, KANG, SUN-HAE, NAM, YOUN-HEE, KIM, SUNG-HWAN, YU, NAE-RY, JENONG, SEUL-GI, YI, SONG-SE, LEE, CHUNG-HEON, JO, YEON-HEE, HWANG, SUN-MIN, KIM, SUNG-MIN, YOON, YONG-WOON, SONG, HYUN-JI, KIM, YUN-JUN, BAEK, JAE-YEOL, KIM, HEA-JUNG, HONG, SEUNG-HEE, KIM, MYEONG-KOO, YOON, BYE-RI, HWANG, WON-JONG
Year of Publication 01.08.2016
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Year of Publication 01.08.2016
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HARD MASK COMPOSITION FOR SPIN COATING
YU, NAE RY, KIM, BOO DEUK, CHOI, JUNG SIK, YI, SONG SE, KIM, JUNG HOON
Year of Publication 26.07.2016
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Year of Publication 26.07.2016
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METHOD OF FORMING A HARDMASK MATERIAL LAYER
KIM, HYUN WOO, YU, NAE RY, KIM, MIN SOO, YI, SONG SE, SONG, HYUN JI, LEE, WON KI, BAEK, JAE YEOL, KIM, MYEONG KOO
Year of Publication 09.08.2016
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Year of Publication 09.08.2016
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METHOD OF PRODUCIMG LAYER STRUCTURE LAYER STRUCTURE AND METHOD OF FORMING PATTERNS
KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
Patent
METHOD OF DETECTING INHOMOGENEITY OF A LAYER AND APPARATUS FOR PERFORMING THE SAME
KIM, DONG WON, KIM, JAE HO, YU, NAE RY, RYU, JIN A, LEE, CHANG HO, JUN, PIL KWON, KIM, JUNG HOON, PARK, JUNG DAE
Year of Publication 23.09.2014
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Year of Publication 23.09.2014
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METHOD OF PRODUCIMG LAYER STRUCTURE, LAYER STRUCTURE, AND METHOD OF FORMING PATTERNS
KANG, SUN HAE, NAM, YOUN HEE, YOON, BYE RI, JEONG, SEUL GI, HONG, SEUNG HEE, YU, NAE RY, KIM, HEA JUNG, KIM, MIN SOO, KIM, YOUNG MIN, YI, SONG SE, BAEK, JAE YEOL, KIM, SUNG HWAN, HWANG, SUN MIN, JO, YEON HEE, KIM, SUNG MIN, LEE, CHUNG HEON, KIM, YUN JUN, SONG, HYUN JI, HWANG, WON JONG, YOON, YONG WOON, KIM, MYEONG KOO
Year of Publication 11.05.2016
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Year of Publication 11.05.2016
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