An empirical approach to accurate single wafer wet etch simulation
Singh, Manish Kumar, Ping-Jung Huang, Yu Pi-Chun, Shih, Jack
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Method for etching etch layer
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Year of Publication 10.10.2023
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Year of Publication 10.10.2023
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Method for etching etch layer and wafer etching apparatus
Huang, Ping-Jung, Chou, Bo-Wei, Yu, Pi-Chun, Shih, Jui-Ming, Singh, Manish Kumar, Ku, Wen-Yu
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Year of Publication 07.05.2019
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METHOD FOR ETCHING ETCH LAYER
CHOU, Bo-Wei, HUANG, Ping-Jung, KU, Wen-Yu, YU, Pi-Chun, SHIH, Jui-Ming, SINGH, Manish Kumar
Year of Publication 23.11.2023
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Year of Publication 23.11.2023
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WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
CHOU, Bo-Wei, HUANG, Ping-Jung, LIN, Chin-Ming, YU, Pi-Chun, YEN, Bi-Ming, CHANG, Chung-Wei, SHEN, Peng
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
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METHOD FOR ETCHING ETCH LAYER
CHOU, Bo-Wei, HUANG, Ping-Jung, KU, Wen-Yu, YU, Pi-Chun, SHIH, Jui-Ming, SINGH, Manish Kumar
Year of Publication 22.08.2019
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Year of Publication 22.08.2019
Patent
METHOD FOR ETCHING ETCH LAYER AND WAFER ETCHING APPARATUS
SINGH Manish Kumar, SHIH Jui-Ming, CHOU Bo-Wei, KU Wen-Yu, HUANG Ping-Jung, YU Pi-Chun
Year of Publication 27.10.2016
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Year of Publication 27.10.2016
Patent
METHOD FOR ETCHING ETCH LAYER AND WAFER ETCHING APPARATUS
YU PI CHUN, KU WEN YU, SHIH JUI MING, SINGH MANISH KUMAR, CHOU BO WEI, HUANG PING JUNG
Year of Publication 04.11.2016
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Year of Publication 04.11.2016
Patent