Methods of forming material layer, semiconductor devices, and methods of manufacturing the same
Shiratori, Tsubasa, Kim, Haeryong, Lee, Jinho, Kim, Younsoo, Kim, Jaewoon
Year of Publication 23.04.2024
Get full text
Year of Publication 23.04.2024
Patent
METHOD OF MANUFACTURING METAL NITRIDE FILM AND ELECTRONIC DEVICE INCLUDING METAL NITRIDE FILM
LEE, Jooho, KIM, Haeryong, KIM, Younsoo, SONG, Jeonggyu, JUNG, Kyooho
Year of Publication 28.12.2023
Get full text
Year of Publication 28.12.2023
Patent
Integrated circuit device including capacitor with metal nitrate interfacial layer
Song, Jeonggyu, Kim, Haeryong, Jung, Kyooho, Lee, Jooho, Kim, Younsoo
Year of Publication 07.11.2023
Get full text
Year of Publication 07.11.2023
Patent
Interface Analysis of MIM Capacitor Using ZrN Electrodes and ALD-ZrO 2 Dielectrics
Choi, Jae Hyoung, Kim, Younsoo, Lim, Jae Soon, Park, Min Young, Chung, Suk-Jin, Kang, Sang Yeol, Cho, Kyuho, Yoo, Cha Young, Moon, Joo Tae, Lee, Hyung Ik, Kim, Ki Hong, Choi, Hye Ran, Chung, Jaekwan
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
Get full text
Journal Article
METHOD OF MANUFACTURING METAL NITRIDE FILM AND ELECTRONIC DEVICE INCLUDING METAL NITRIDE FILM
LEE, Jooho, KIM, Haeryong, KIM, Younsoo, SONG, Jeonggyu, JUNG, Kyooho
Year of Publication 15.09.2022
Get full text
Year of Publication 15.09.2022
Patent