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"YOSHITOMI YASUKI"
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"YOSHITOMI YASUKI"
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LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
by
ARAHORI, TADAHISA
,
YOSHITOMI
,
YASUKI
Year of Publication
28.03.2002
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LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
by
ARAHORI, TADAHISA
,
YOSHITOMI
,
YASUKI
Year of Publication
03.03.2010
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COOLING PLATE
by
YOSHITOMI YASUKI
Year of Publication
03.10.2003
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LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
by
ARAHORI, TADAHISA
,
YOSHITOMI
,
YASUKI
Year of Publication
27.05.2009
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VACUUM CHUCK FOR WAFER AND ITS MANUFACTURING METHOD
by
YOSHITOMI YASUKI
Year of Publication
31.08.2001
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ALUMINA CERAMIC SINTERED COMPACT HAVING EXCELLENT CORROSION RESISTANCE
by
YOSHITOMI YASUKI
Year of Publication
12.09.2000
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JP2993373B
by
YOSHITOMI YASUKI
Year of Publication
20.12.1999
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LAPPING PLATE AND ITS MANUFACTURE
by
YOSHITOMI YASUKI
Year of Publication
15.06.1999
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Low thermal expansion ceramic and member for exposure system
by
YOSHITOMI YASUKI
,
ARAHORI TADAHISA
Year of Publication
26.09.2006
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Low thermal expansion ceramic and member for exposure system
by
Yoshitomi
,
Yasuki
,
Arahori, Tadahisa
Year of Publication
26.09.2006
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LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
by
ARAHORI, TADAHISA
,
YOSHITOMI
,
YASUKI
Year of Publication
14.09.2005
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PATTERN PROCESSING METHOD AND CERAMIC MEMBER HAVING PATTERN
by
YOSHITOMI YASUKI
Year of Publication
02.02.1996
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PRODUCTION OF LAPPING PLATE MADE OF CERAMICS
by
YOSHITOMI YASUKI
Year of Publication
07.03.1995
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LOW THERMAL EXPANSION CERAMIC MEMBER, METHOD OF MANUFACTURING THE SAME, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE APPARATUS
by
YOSHITOMI YASUKI
,
TANAKA MANABU
Year of Publication
10.06.2004
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METHOD FOR APPLYING DISCRIMINATION SYMBOL TO CERAMIC SURFACE
by
YOSHITOMI YASUKI
Year of Publication
12.07.1994
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VACUUM CHUCK
by
YOSHITOMI YASUKI
,
ARAHORI TADAHISA
Year of Publication
11.07.2003
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LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
by
ARAHORI, TADAHISA
,
YOSHITOMI
,
YASUKI
Year of Publication
02.07.2003
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Low thermal expansion ceramic and member for exposure system
by
YOSHITOMI YASUKI
,
ARAHORI TADAHISA
Year of Publication
29.05.2003
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Low thermal expansion ceramic and member for exposure system
by
Arahori, Tadahisa
,
Yoshitomi
,
Yasuki
Year of Publication
29.05.2003
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BLACK, LOW THERMAL EXPANSION CERAMIC, METHOD OF PRODUCING THE SAME, AND MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS
by
YOSHITOMI YASUKI
,
ARAHORI TADAHISA
Year of Publication
09.10.2002
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