HEATER FOR PROCESSING CHAMBER
ZUNIGA LEONEL A, KELKAR UMESH, MOSELY RODERICK CRAIG, POPIOLKOWSKI ALAN, SMITH PAUL F, YUDOVSKY JOSEPH, KHURANA NITIN, YOSHIDOME TED, GILLIAM ALISON, SHERSTINSKY SEMYON
Year of Publication 31.08.2001
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Year of Publication 31.08.2001
Patent
Heater for processing chamber
MOSELY ROD, ZUNIGA LEONEL A, POPIOLKOWSKI ALAN, YUDOVSKY JOSEPH, YOSHIDOME TED, KHURANA NITIN, SHERSTINSKY SEMYON, GILLIAM ALISON, KELKAR UMESH MADHAV, SMITH PAUL
Year of Publication 26.02.2002
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Year of Publication 26.02.2002
Patent
Heater for processing chamber
Sherstinsky, Semyon, Gilliam, Alison, Smith, Paul, Zuniga, Leonel A, Yoshidome, Ted, Khurana, Nitin, Mosely, Rod, Kelkar, Umesh Madhav, Yudovsky, Joseph, Popiolkowski, Alan
Year of Publication 26.02.2002
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Year of Publication 26.02.2002
Patent