Search Results - "YOON Kuihyun" :: K.UTB vyhledávací portál

Substrate supporting device substrate process apparatus including the same and substrate process method using the same

by MIN HEEWON, LIM SEUNGBIN, KIM JUHO, YEO DONGYUN, KANG SONGYUN, YOON KUIHYUN, KWON YOUNGROK
Year of Publication 20.05.2024

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Focus ring apparatus for substrate treatment including the same and method for substrate treatment using the same

by BAEK SEUNGHAN, KIM NAMKYUN, KIM KYUNG SUN, NAM SANG KI, JEON KANGMIN, HAN DONGSEOK, YOON KUIHYUN
Year of Publication 16.05.2023

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Plasma confinement ring apparatus for semiconductor manufacturing including the same and semiconductor device manufacturing method using the same

by KIM NAM KYUN, BAEK SEUNGHAN, AHN SEUNGBIN, LEE CHANGHEON, KO JUNGMIN, KIM TAE HYUN, NAM SANG KI, SEO KWONSANG, JEON KANGMIN, JANG SUNGHO, YOON KUIHYUN, YANG JUNGMO
Year of Publication 08.11.2022

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SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND A SUBSTRATE PROCESSING METHOD USING THE SAME

by LIM, Seungbin, YEO, Dongyun, KIM, Juho, MIN, Heewon, KANG, Songyun, YOON, Kuihyun, KWON, Youngrok
Year of Publication 16.05.2024

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PLASMA PROCESSING APPARATUS AND METHOD

by Yoon, Kuihyun, Lee, Changheon, Nam, Sangki, Lee, Kiho, Choi, Seoyeon, Lee, Sangho, Cho, Junghyun, Lee, Sangheun, Rhee, Jaemin
Year of Publication 27.06.2024

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Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system

by Yoon, Kuihyun, Heo, Young, Seo, Wonguk
Year of Publication 14.01.2020

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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

by Yoon, Kuihyun, Nam, Sangki, Han, Dongseok, Seo, Kwonsang, Kim, Namkyun, Baek, Seunghan
Year of Publication 11.05.2023

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Etching apparatus

by Yoon, Kuihyun, Kim, Yunhwan, Kim, Kyohyeok, Han, Jewoo, Lee, Jaehak, Lee, Jongkeun
Year of Publication 29.11.2022

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SUBSTRATE PROCESSING APPARATUS

by SUNG, Dougyong, KIM, Namkyun, YOO, Suyoung, NAM, Sangki, KIM, Yunhwan, KO, Jungmin, KIM, Byeongsang, YOON, Kuihyun
Year of Publication 05.10.2023

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GRIP APPARATUS AND SUBSTRATE INSPECTION SYSTEM INCLUDING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SUBSTRATE INSPECTION SYSTEM

by Heo, Young, YOON, KUIHYUN, Seo, Wonguk
Year of Publication 28.03.2019

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FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

by HAN, DONGSEOK, YOON, KUIHYUN, JEON, KANGMIN, KIM, KYUNG-SUN, NAM, SANG KI, BAEK, Seunghan, KIM, Nam Kyun
Year of Publication 11.05.2023

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METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING PARAMETERS OF PLASMA, PLASMA PROCESSING SYSTEM, AND METHOD OF PROCESSING WAFER

by Nam, Yoonbum, Kim, Byeongsang, Yoon, Kuihyun, Okunishi, Naohiko, Shim, Seungbo, Han, Dongseok, Kim, Namkyun, Na, Donghyeon, Hur, Minyoung
Year of Publication 02.03.2023

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ETCHING APPARATUS

by Yoon, Kuihyun, Kim, Yunhwan, Kim, Kyohyeok, Han, Jewoo, Lee, Jaehak, Lee, Jongkeun
Year of Publication 15.04.2021

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PLASMA CONFINEMENT RING, SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME

by YANG, Jungmo, NAM, Sang Ki, JANG, Sungho, AHN, Seungbin, YOON, Kuihyun, KO, Jungmin, KIM, Tae-Hyun, BAEK, Seunghan, LEE, Changheon, JEON, Kangmin, KIM, Nam Kyun, SEO, Kwonsang
Year of Publication 03.11.2022

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