Quasi‐atomic layer etching of silicon with surface chlorination and removal using Ar or He plasmas
Kim, Namgun, Kim, Whan Kyun, Shin, Dongjun, Kim, Jong Kyu, Lee, Chan Min, Yoon, Kuk Han, Ko, Youngju, Chae, Heeyeop
Published in Plasma processes and polymers (01.06.2024)
Published in Plasma processes and polymers (01.06.2024)
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Journal Article
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
PARK, DONG KYUN, KIM, HYONG SOO, PARK, SANG JUN, KANG, MAN SUG, YOON, KUK HAN
Year of Publication 28.10.2013
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Year of Publication 28.10.2013
Patent
METHOD FOR FORMING FINE PATTERNS OF SEMICONDUCTOR DEVICE
PARK, JOON SOO, YOON, KUK HAN, PARK, JONG CHUL, KIM, CHEOL HONG, NAM, SEOK WOO
Year of Publication 08.10.2013
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Year of Publication 08.10.2013
Patent
METHOD FOR FORMING FINE PATTERNS OF SEMICONDUCTOR DEVICE
PARK, JOON SOO, KIM, JOON, YOON, KUK HAN, KIM, CHEOL HONG, NAM, SEOK WOO
Year of Publication 08.10.2013
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Year of Publication 08.10.2013
Patent
METHODS OF FABRICATING A SEMICONDUCTOR MEMORY DEVICE
JEONG, SANG SUP, CHOI, YONG JOON, LEE, JUN SOO, YOON, KUK HAN, KIM, JONG KYU, CHO, SUNG IL
Year of Publication 12.09.2012
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Year of Publication 12.09.2012
Patent
SEMICONDUCTOR DEVICE HAVING CAPACITORS
OH, YONG CHUL, JUN, JONG RYUL, KIM, CHEON BAE, JIN, GYO YOUNG, YOON, KUK HAN, LEE, KYU PIL, CHO, CHANG HYUN
Year of Publication 04.07.2013
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Year of Publication 04.07.2013
Patent
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING A BOW RESISTANT LAYER
PARK, KI JIN, KOO, SEONG MO, LEE, JUN SOO, YOON, KUK HAN, LEE, CHEOL KYU, KIM, JONG KYU
Year of Publication 12.09.2012
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Year of Publication 12.09.2012
Patent
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
JEONG, SANG SUP, CHOI, YONG JOON, PARK, HEUNG SIK, YOON, KUK HAN, CHOI, SUNG GIL, KIM, JONG KYU
Year of Publication 29.09.2010
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Year of Publication 29.09.2010
Patent
Selective oxide trench etch for dual damascene process in a transformer coupled plasma system
Woo Sung Chu, Kuk Han Yoon, Han Sik Yoon, Wook Hyan Koh, Dong Seok Kim, Jae Hyun Park, Jae Hee Ha
Published in ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) (1999)
Published in ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) (1999)
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Conference Proceeding
Semiconductor device and method of manufacturing the same
Kim, Pyung-Ho, Koo, Seong-Mo, Yoon, Kuk-Han, Kim, Ki-Youl, Kim, Yong-Hwan
Year of Publication 01.12.2020
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Year of Publication 01.12.2020
Patent
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
KIM, Pyung-Ho, KIM, Yong-Hwan, KIM, Ki-Youl, YOON, Kuk-Han, KOO, Seong-Mo
Year of Publication 27.06.2019
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Year of Publication 27.06.2019
Patent