System, method and storage medium for semiconductor manufacturing
TAL, NOAM, YOGOV SHAY, STREICH, BOAZ, BRANOWICZ, BAREK, COHEN, ODED, YAACOBI RAHN
Year of Publication 16.04.2024
Get full text
Year of Publication 16.04.2024
Patent
Machine and deep learning method for spectrum-based metrology and process control
TAL, NOAM, YOGOV SHAY, STREICH, BOAZ, BRANOWICZ, BAREK, COHEN, ODED, YAACOBI RAHN
Year of Publication 02.12.2022
Get full text
Year of Publication 02.12.2022
Patent
Semiconductor metrology method and semiconductor metrology system
RABINOVICH, ILAN, TAL, NOAM, YOGOV SHAY, BREUTMAN, ARIEL, RABINOVICH ILYA, KIM YONG-HA, KANDEL DANIEL, BRANOWICZ, BAREK, COHEN, ODED, ROTSTEIN EITAN, ZAHARONI, TAL
Year of Publication 02.09.2022
Get full text
Year of Publication 02.09.2022
Patent