OPTICAL DEFLECTOR, DEFLECTING DEVICE, DISTANCE MEASURING DEVICE, IMAGE PROJECTION DEVICE, AND MOVABLE BODY
SHINKAWA MIZUKI, YODA MITSUHIRO, SUZUKI SHUICHI, SATO YUKITO, AKANUMA GOICHI
Year of Publication 10.06.2021
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Year of Publication 10.06.2021
Patent
An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform
Yasunaga, Shun, Misumi, Kei, Mizushima, Ayako, Toyokura, Atsushi, Ota, Etsuko, Inoue, Yurie, Fujiwara, Makoto, Kawai, Noriko, Yoda, Mitsuhiro, Tsuboi, Shinji, Sawamura, Tomoki, Higo, Akio, Nakane, Ryosho, Ochiai, Yukinori, Mita, Yoshio
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
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