A Data Mining Technique for Real Time Process Monitoring with Mass Spectrometry : APC: Advanced Process Control
Park, Soyeon, Lee, Sungbin, Hong, Eunsun, Kim, Bumsik, Yi, Jihye, Kim, Gyeom, Kim, Jinho, Park, Jungdae
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
SEMICONDUCTOR DEVICE INCLUDING EPITAXIAL REGION
KIM, GYEOM, KIM, JINBUM, Yi, Jihye, Lee, Sangmoon, Kim, Dongwoo, Lee, Seunghun
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
Patent
Semiconductor device including epitaxial region
Kim, Gyeom, Yi, Jihye, Kim, Jinbum, Lee, Sangmoon, Kim, Dongwoo, Lee, Seunghun
Year of Publication 09.01.2024
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Year of Publication 09.01.2024
Patent
SEMICONDUCTOR DEVICE INCLUDING EPITAXIAL REGION
KIM, GYEOM, KIM, JINBUM, Yi, Jihye, Lee, Sangmoon, Kim, Dongwoo, Lee, Seunghun
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
Patent
Semiconductor device including epitaxial region having an extended portion
Kim, Gyeom, Yi, Jihye, Lee, Sangmoon, Kim, Dongwoo, Kim, JinBum, Lee, Seunghun
Year of Publication 05.07.2022
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Year of Publication 05.07.2022
Patent
SEMICONDUCTOR DEVICE INCLUDING EPITAXIAL REGION
Kim, Gyeom, Yi, Jihye, Lee, Sangmoon, Kim, Dongwoo, Kim, JinBum, Lee, Seunghun
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
Patent
On the Gate Oxide Scaling of Sub-100nm CMOS Transistors
Seungheon Song, Jihye Yi, Woosik Kim, Kazuyuki Fujihara, Ho-Kyu Kang, Joo-Tae Moon, Moon-Yong Lee
Published in Journal of semiconductor technology and science (2001)
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Published in Journal of semiconductor technology and science (2001)
Journal Article