Etch and Wet Clean Challenges and Joint Optimization
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Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Year of Publication 08.11.2022
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Year of Publication 07.10.2021
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Year of Publication 07.10.2021
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Wafer cleaning apparatus and method
Huang, Ping-Jung, Hsia, Pei Yen, Huang, Jieh-Chau, Yen, Bi-Ming, Hu, Hung-Lung, Hsia, Ying Ting
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
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Method of Removing an Etch Mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Chuo, Tsung-Min, Shih, Jui-Ming, Chen, Nai-Chia
Year of Publication 13.08.2020
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Year of Publication 13.08.2020
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Method of removing an etch mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Chuo, Tsung-Min, Shih, Jui-Ming, Chen, Nai-Chia
Year of Publication 28.04.2020
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Year of Publication 28.04.2020
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Method of removing an etch mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Shih, Jui-Ming, Chuo, Tsung-Min, Chen, Nai-Chia
Year of Publication 04.02.2020
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Year of Publication 04.02.2020
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WAFER CLEANING APPARATUS AND METHOD
HUANG, Ping-Jung, HUANG, Jieh-Chau, HSIA, Ying Ting, HU, Hung-Lung, YEN, Bi-Ming, HSIA, Pei Yen
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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Method of Removing an Etch Mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Chuo, Tsung-Min, Shih, Jui-Ming, Chen, Nai-Chia
Year of Publication 28.03.2019
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Year of Publication 28.03.2019
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Method of Removing an Etch Mask
Huang, Ping-Jung, Chu, Chun-Han, Yen, Bi-Ming, Shih, Jui-Ming, Chuo, Tsung-Min, Chen, Nai-Chia
Year of Publication 31.05.2018
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Year of Publication 31.05.2018
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Etching process
Yeh Ming-Hsi, Yen Bi-Ming, Lin Yih-Ann, Jang Syun-Ming, Chen Chao-Cheng
Year of Publication 21.03.2017
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Year of Publication 21.03.2017
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In-situ photoresist strip during plasma etching of active hard mask
Cho, Sangjun, Choi, Tom, Han, Taejoon, Kang, Sean, Gopaladasu, Prabhakara, Yen, Bi-Ming
Year of Publication 09.10.2012
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Year of Publication 09.10.2012
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