TEST PADS FOR MEASURING PROPERTIES OF A WAFER
KAGAN, ALEXANDER, FENG, YIPING, PEI, SHIYOU, YEH, DENNIS, EDELSTEIN, SERGIO, ZHANG, XIAFANG, SHI, JIANOU, HUANG, SHU, CHUN, KHAN, AHMAD, RZEPIELA, JEFFREY, A
Year of Publication 23.04.2009
Get full text
Year of Publication 23.04.2009
Patent
Test Pads, Methods and Systems for Measuring Properties of a Wafer
PEI SHIYOU, HUANG SHU C, ZHANG XIAFANG, RZEPIELA JEFFREY A, SHI JIANOU, FENG YIPING, KHAN AHMAD, YEH DENNIS
Year of Publication 17.05.2007
Get full text
Year of Publication 17.05.2007
Patent
TEST PADS, METHODS AND SYSTEMS FOR MEASURING PROPERTIES OF A WAFER, AND SYSTEMS AND METHODS FOR CONTROLLING DEPOSITION OF A CHARGE ON A WAFER FOR MEASUREMENT OF ONE OR MORE ELECTRICAL PROPERTIES OF THE WAFER
KAGAN, ALEXANDER, FENG, YIPING, PEI, SHIYOU, YEH, DENNIS, EDELSTEIN, SERGIO, ZHANG, XIAFANG, SHI, JIANOU, HUANG, SHU, CHUN, KHAN, AHMAD, RZEPIELA, JEFFREY, A
Year of Publication 22.02.2007
Get full text
Year of Publication 22.02.2007
Patent