Nonequilibrium situations in a pulse-modulated Ar-H2 inductively coupled thermal plasma for hydrogen doping
Get full text
Conference Proceeding
Journal Article
Investigation of surface treatment of conductive wire in cylindrical atmospheric pressure plasmas
Get full text
Journal Article
Conference Proceeding
Controlled generation of pulse-modulated RF plasmas for materials processing
Ye, Rubin, Ishigaki, Takamasa, Sakuta, Tadahiro
Published in Plasma sources science & technology (01.05.2005)
Published in Plasma sources science & technology (01.05.2005)
Get full text
Journal Article
Improved UV emission of zinc oxide through hyrogen doping in pulse-modulated high-power ICP
Ishigaki, Takamasa, Ohashi, Naoki, Taguchi, Hiroyuki, Ye, Rubin, Haneda, Hajime, Ito, Shigeru
Published in Thin solid films (26.05.2006)
Published in Thin solid films (26.05.2006)
Get full text
Journal Article
Turbulence phenomena in the radio frequency induction plasma torch
Ye, Rubin, Proulx, Pierre, Boulos, Maher I.
Published in International journal of heat and mass transfer (01.05.1999)
Published in International journal of heat and mass transfer (01.05.1999)
Get full text
Journal Article
Particle turbulent dispersion and loading effects in an inductively coupled radio frequency plasma
Ye, Rubin, Proulx, Pierre, Boulos, Maher I
Published in Journal of physics. D, Applied physics (07.09.2000)
Published in Journal of physics. D, Applied physics (07.09.2000)
Get full text
Journal Article
Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located
Wu, Ziyang, Ye, Rubin, Liang, Jie, Tu, Leyi, Ni, Tuqiang, Wong, Manus
Year of Publication 11.04.2023
Get full text
Year of Publication 11.04.2023
Patent
Improved UV emission of zinc oxide through hyrogen doping in pulse-modulated high-power ICP
ISHIGAKI, Takamasa, OHASHI, Naoki, TAGUCHI, Hiroyuki, RUBIN YE, HANEDA, Hajime, ITO, Shigeru
Published in Thin solid films (2006)
Get full text
Published in Thin solid films (2006)
Conference Proceeding
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATUS WHERE THE ELECTROSTATIC CHUCK IS LOCATED
Wu, Ziyang, Ye, Rubin, Liang, Jie, Tu, Leyi, Ni, Tuqiang, Wong, Manus
Year of Publication 12.03.2020
Get full text
Year of Publication 12.03.2020
Patent