Search Results - "YASUTAKE, Kiyoshi" :: K.UTB vyhledávací portál

Pulsed very high-frequency plasma-enhanced chemical vapor deposition of silicon films for low-temperature (120 °C) thin film transistors

by Kakiuchi, Hiroaki, Ohmi, Hiromasa, Yasutake, Kiyoshi
Published in Journal of physics. D, Applied physics (07.10.2020)

Get full text

Journal Article

Loading…

Controllability of structural and electrical properties of silicon films grown in atmospheric-pressure very high-frequency plasma

by Kakiuchi, Hiroaki, Ohmi, Hiromasa, Yasutake, Kiyoshi
Published in Journal of physics. D, Applied physics (06.08.2018)

Get full text

Journal Article

Loading…

Study on silicon removal property and surface smoothing phenomenon by moderate-pressure microwave hydrogen plasma

by Ohmi, Hiromasa, Kimoto, Kenta, Nomura, Toshimitsu, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Materials science in semiconductor processing (01.07.2021)

Get full text

Journal Article

Loading…

Efficiency of silane gas generation in high-rate silicon etching by narrow-gap microwave hydrogen plasma

by Ohmi, Hiromasa, Funaki, Takeshi, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Journal of physics. D, Applied physics (09.12.2015)

Get full text

Journal Article

Loading…

Diffusion of excessively adsorbed hydrogen atoms on hydrogen terminated Si(100)(2×1) surface

by Inagaki, Kouji, Morikawa, Yoshitada, Ohmi, Hiromasa, Yasutake, Kiyoshi, Kakiuchi, Hiroaki
Published in AIP advances (01.08.2021)

Get full text

Journal Article

Loading…

Significant Improvement of Copper Dry Etching Property of a High-Pressure Hydrogen-Based Plasma by Nitrogen Gas Addition

by Ohmi, Hiromasa, Sato, Jumpei, Shirasu, Yoshiki, Hirano, Tatsuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in ACS omega (28.02.2019)

Get full text

Journal Article

Loading…

Interface properties of SiOxNy layer on Si prepared by atmospheric-pressure plasma oxidation-nitridation

by Zhuo, Zeteng, Sannomiya, Yuta, Kanetani, Yuki, Yamada, Takahiro, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Nanoscale research letters (01.05.2013)

Get full text

Journal Article

Loading…

Impacts of noble gas dilution on Si film structure prepared by atmospheric-pressure plasma enhanced chemical transport

by Ohmi, Hiromasa, Kishimoto, Kazuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Journal of physics. D, Applied physics (07.10.2008)

Get full text

Journal Article

Loading…

Effects of Surface Temperature on High-Rate Etching of Silicon by Narrow-Gap Microwave Hydrogen Plasma

by Yamada, Takahiro, Ohmi, Hiromasa, Okamoto, Kohei, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Japanese Journal of Applied Physics (01.10.2012)

Get full text

Journal Article

Loading…

Effect of H2 Flow Rate on High-Rate Etching of Si by Narrow-Gap Microwave Hydrogen Plasma

by Yamada, Takahiro, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Plasma chemistry and plasma processing (01.08.2013)

Get full text

Journal Article

Loading…

Low-temperature synthesis of microcrystalline 3C-SiC film by high-pressure hydrogen-plasma-enhanced chemical transport

by Ohmi, Hiromasa, Hori, Takahiro, Mori, Tetsuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Journal of physics. D, Applied physics (15.06.2011)

Get full text

Journal Article

Loading…

PFC-Free Dry Etching Method for Si Using Narrow-Gap VHF Plasma at Subatmospheric Pressure

by Ohmi, Hiromasa, Kishimoto, Kazuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Journal of the Electrochemical Society (2010)

Get full text

Journal Article

Loading…

Voltage distribution over capacitively coupled plasma electrode for atmospheric-pressure plasma generation

by Shuto, Mitsutoshi, Tomino, Fukumi, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Nanoscale research letters (01.05.2013)

Get full text

Journal Article

Loading…

Study on the growth of heteroepitaxial cubic silicon carbide layers in atmospheric-pressure H2-based plasma

by Kakiuchi, Hiroaki, Ohmi, Hiromasa, Yasutake, Kiyoshi
Published in Journal of nanoscience and nanotechnology (01.04.2011)

Get more information

Journal Article

Loading…

Surface cleaning and etching of 4H-SiC(0001) using high-density atmospheric pressure hydrogen plasma

by Watanabe, Heiji, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Hosoi, Takuji, Shimura, Takayoshi, Yasutake, Kiyoshi
Published in Journal of nanoscience and nanotechnology (01.04.2011)

Get more information

Journal Article

Loading…

Effects of Surface Temperature on High-Rate Etching of Silicon by Narrow-Gap Microwave Hydrogen Plasma

by Yamada, Takahiro, Ohmi, Hiromasa, Okamoto, Kohei, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Japanese Journal of Applied Physics (01.10.2012)

Get full text

Journal Article

Loading…

Purified Silicon Film Formation from Metallurgical-Grade Silicon by Hydrogen-Plasma-Induced Chemical Transport

by Ohmi, Hiromasa, Yamada, Takahiro, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
Published in Japanese Journal of Applied Physics (01.08.2011)

Get full text

Journal Article

Loading…

High-rate preparation of thin Si films by atmospheric-pressure plasma enhanced chemical transport

by Kamada, Daiki, Kishimoto, Kazuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi, Ohmi, Hiromasa
Published in Surface and interface analysis (01.06.2008)

Get full text

Journal Article Conference Proceeding

Loading…

Photoluminescence Study of Defect-Free Epitaxial Silicon Films Grown at Low Temperatures by Atmospheric Pressure Plasma Chemical Vapor Deposition

by Yasutake, Kiyoshi, Tawara, Naotaka, Ohmi, Hiromasa, Terai, Yoshikazu, Kakiuchi, Hiroaki, Watanabe, Heiji, Fujiwara, Yasufumi
Published in Japanese Journal of Applied Physics (01.04.2007)

Get full text

Journal Article

Loading…

Heteroepitaxial growth of cubic SiC on Si using very-high-frequency plasma at atmospheric pressure

by Kakiuchi, Hiroaki, Ohmi, Hiromasa, Aketa, Masatoshi, Nakamura, Ryota, Yasutake, Kiyoshi
Published in Surface and interface analysis (01.06.2008)

Get full text

Journal Article Conference Proceeding

Refine Results

Format

Subject Area

Topic

Language

Year of Publication

Database