Impact of Deposition Temperature on Crystal Structure and Ferroelectric Properties of (Al1−x Sc x )N Films Prepared by Sputtering Method
Yasuoka, Shinnosuke, Shimizu, Takao, Tateyama, Akinori, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Funakubo, Hiroshi
Published in Physica status solidi. A, Applications and materials science (01.09.2021)
Published in Physica status solidi. A, Applications and materials science (01.09.2021)
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Journal Article
Impact of Deposition Temperature on Crystal Structure and Ferroelectric Properties of (Al1−x Sc x )N Films Prepared by Sputtering Method
Yasuoka, Shinnosuke, Shimizu, Takao, Tateyama, Akinori, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Funakubo, Hiroshi
Published in Physica status solidi. A, Applications and materials science (01.09.2021)
Published in Physica status solidi. A, Applications and materials science (01.09.2021)
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Journal Article
The ferroelectric and piezoelectric properties of (Hf1−x Ce x )O2 films on indium tin oxide/Pt/TiO x /SiO2/(100)Si substrates obtained using a no-heating radio-frequency magnetron sputtering deposition method
Chaya, Nachi, Okamoto, Kazuki, Hirai, Koji, Yasuoka, Shinnosuke, Inoue, Yukari, Yamaoka, Wakiko, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (30.04.2024)
Published in Japanese Journal of Applied Physics (30.04.2024)
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Journal Article
The ferroelectric and piezoelectric properties of (Hf 1−x Ce x )O 2 films on indium tin oxide/Pt/TiO x /SiO 2 /(100)Si substrates obtained using a no-heating radio-frequency magnetron sputtering deposition method
Chaya, Nachi, Okamoto, Kazuki, Hirai, Koji, Yasuoka, Shinnosuke, Inoue, Yukari, Yamaoka, Wakiko, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.04.2024)
Published in Japanese Journal of Applied Physics (01.04.2024)
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Journal Article
The ferroelectric and piezoelectric properties of (Hf1−xCex)O2 films on indium tin oxide/Pt/TiOx/SiO2/(100)Si substrates obtained using a no-heating radio-frequency magnetron sputtering deposition method
Nachi Chaya, Okamoto, Kazuki, Hirai, Koji, Yasuoka, Shinnosuke, Inoue, Yukari, Yamaoka, Wakiko, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.04.2024)
Published in Japanese Journal of Applied Physics (01.04.2024)
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Journal Article
Tunable Ferroelectric Properties in Wurtzite (Al0.8Sc0.2)N via Crystal Anisotropy
Yasuoka, Shinnosuke, Mizutani, Ryoichi, Ota, Reika, Shiraishi, Takahisa, Shimizu, Takao, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Funakubo, Hiroshi
Published in ACS applied electronic materials (22.11.2022)
Published in ACS applied electronic materials (22.11.2022)
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Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC cm−2 around 10 nm in thickness
Mizutani, Ryoichi, Yasuoka, Shinnosuke, Shiraishi, Takahisa, Shimizu, Takao, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Sakata, Osami, Funakubo, Hiroshi
Published in Applied physics express (01.10.2021)
Published in Applied physics express (01.10.2021)
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ALUMINUM SCANDIUM NITRIDE FILM AND FERROELECTRIC ELEMENT
IIHAMA Junya, FUNAKUBO Hiroshi, MIZUTANI Ryoichi, YASUOKA Shinnosuke, MESUDA Masami, SUEMOTO Yuya, KUSUSE Yoshiro, SHIRAISHI Takahisa, OTA Reika, UEOKA Yoshihiro
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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강유전성 박막, 이를 이용한 전자 소자 및 강유전성 박막의 제조 방법
SHIMIZU TAKAO, YAMADA HIROSHI, UEHARA MASATO, AKIYAMA MORITO, YASUOKA SHINNOSUKE, FUNAKUBO HIROSH
Year of Publication 02.08.2022
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Year of Publication 02.08.2022
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Aluminum scandium nitride film and ferroelectric element
SHIRAISHI, TAKAHISA, KUSUSE, YOSHIRO, MIZUTANI, RYOICHI, OTA, REIKA, MESUDA, MASAMI, YASUOKA, SHINNOSUKE, IIHAMA, JUNYA, SUEMOTO, YUYA, UEOKA, YOSHIHIRO, FUNAKUBO, HIROSHI
Year of Publication 16.10.2023
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Year of Publication 16.10.2023
Patent