Reactive plasma immersion ion implantation for surface passivation
Yankov, R.A., Shevchenko, N., Rogozin, A., Maitz, M.F., Richter, E., Möller, W., Donchev, A., Schütze, M.
Published in Surface & coatings technology (23.04.2007)
Published in Surface & coatings technology (23.04.2007)
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Journal Article
Conference Proceeding
Microarrays of silicon-based light emitters for novel biosensor and lab-on-a-chip applications
Rebohle, L., Gebel, T., Yankov, R.A., Trautmann, T., Skorupa, W., Sun, J., Gauglitz, G., Frank, R.
Published in Optical materials (01.02.2005)
Published in Optical materials (01.02.2005)
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Journal Article
Conference Proceeding
Quenching of electroluminescence and charge trapping in high-efficiency Ge-implanted MOS light-emitting silicon diodes
NAZAROV, A. N, OSIYUK, I. N, SUN, J. M, YANKOV, R. A, SKORUPA, W, TYAGULSKII, I. P, LYSENKO, V. S, PRUCNAL, S, GEBEL, T, REBOHLE, L
Published in Applied physics. B, Lasers and optics (01.03.2007)
Published in Applied physics. B, Lasers and optics (01.03.2007)
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Journal Article
Comparative Study of Charge Trapping in High-Dose Si and Ge-Implanted Al/SiO2/Si Structures
Nazarov, A, Skorupa, W, Osiyuk, I N, Tjagulskii, I P, Lysenko, V S, Yankov, R A, Gebel, T
Published in Journal of the Electrochemical Society (01.01.2005)
Published in Journal of the Electrochemical Society (01.01.2005)
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Journal Article
Formation of light-emitting Si nanostructures in SiO2 by pulsed anneals
Kachurin, G A, Cherkova, S G, Marin, D V, Yankov, R A, Deutschmann, M
Published in Nanotechnology (03.09.2008)
Published in Nanotechnology (03.09.2008)
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Journal Article
The effect of radio-frequency plasma treatment on the electroluminescent properties of violet light-emitting germanium implanted metal-oxide–semiconductor structures
Nazarov, A.N., Vovk, J.N., Osiyuk, I.N., Tkachenko, A.S., Tyagulskii, I.P., Lysenko, V.S., Gebel, T., Rebohle, L., Skorupa, W., Yankov, R.A.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
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Journal Article
Wave-ordered structures formed on SOI wafers by reactive ion beams
Smirnov, V.K., Kibalov, D.S., Krivelevich, S.A., Lepshin, P.A., Potapov, E.V., Yankov, R.A., Skorupa, W., Makarov, V.V., Danilin, A.B.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article
Charge trapping phenomena in high-efficiency metal-oxide-silicon light-emitting diodes with ion-implanted oxide
Nazarov, A., Osiyuk, I., Tyagulskii, I., Lysenko, V., Prucnal, S., Sun, J., Skorupa, W., Yankov, R.A.
Published in Journal of luminescence (01.12.2006)
Published in Journal of luminescence (01.12.2006)
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Journal Article
Conference Proceeding
Defects remaining in MeV-ion-implanted and annealed Si away from the peak of the nuclear energy deposition profile
Kögler, R., Yankov, R.A., Posselt, M., Danilin, A.B., Skorupa, W.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article
Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Rogozin, A., Vinnichenko, M., Shevchenko, N., Vazquez, L., Mücklich, A., Kreissig, U., Yankov, R.A., Kolitsch, A., Möller, W.
Published in Journal of materials research (01.08.2007)
Published in Journal of materials research (01.08.2007)
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Journal Article
Trans-projected-range effect in proximity gettering of impurities in silicon
Gueorguiev, Y.M, Kögler, R, Peeva, A, Panknin, D, Mücklich, A, Yankov, R.A, Skorupa, W
Published in Vacuum (15.06.2001)
Published in Vacuum (15.06.2001)
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Journal Article
Conference Proceeding
Modelling high-temperature co-implantation of N + and Al + ions in silicon carbide: the effect of stress on the implant and damage distributions
Rybin, P.V., Kulikov, D.V., Trushin, Yu.V., Yankov, R.A., Ecke, G., Fukarek, W., Skorupa, W., Pezoldt, J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article
Advanced thermal processing of semiconductor materials in the millisecond range
Skorupa, W., Anwand, W., Panknin, D., Voelskow, M., Yankov, R.A., Gebel, T.
Published in Vacuum (30.05.2005)
Published in Vacuum (30.05.2005)
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Journal Article
(AlN) x(SiC) 1− x buried layers implanted in 6H–SiC: a theoretical study of their optimized composition
Masri, P., Rouhani Laridjani, M., Pezoldt, J., Yankov, R.A., Skorupa, W., Averous, M.
Published in Applied surface science (12.12.2001)
Published in Applied surface science (12.12.2001)
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Journal Article
Conference Proceeding
The effects of the annealing temperature on the formation of helium-filled structures in silicon
Fichtner, P.F.P, Kaschny, J.R, Behar, M, Yankov, R.A, Mücklich, A, Skorupa, W
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article