Search Results - "YANG PAI HSUEH" :: K.UTB vyhledávací portál

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Auto-calibration of attraction-only type actuator commutations

by Yang, Pai Hsueh, Teng, Tim, Hirano, Kazuhiro, Yuan, Bausan
Year of Publication 25.04.2006

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STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION COMPENSATION, LOW TRANSMISSIBILITY, AND LIGHTWEIGHT FINE STAGE

by MA WEN-HOU, YUAN BAUSAN, BINNARD MICHAEL, YANG PAI-HSUEH, UETA TOSHIO, TENG TINGIEN
Year of Publication 13.11.2008

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Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

by MA WEN-HOU, YUAN BAUSAN, BINNARD MICHAEL, YANG PAI-HSUEH, UETA TOSHIO, TENG TINGIEN
Year of Publication 26.08.2008

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Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

by Binnard, Michael, Ma, Wen-Hou, Ueta, Toshio, Yang, Pai-Hsueh, Teng, Ting-Chien, Yuan, Bausan
Year of Publication 26.08.2008

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MODULAR STAGE WITH REACTION FORCE CANCELLATION

by Kho, Leonard, Poon, Alex, Yang, Pai-Hsueh, Chang, Ping-Wei
Year of Publication 26.08.2004

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Double isolation fine stage

by Kho, Leonard, Poon, Alex, Yang, Pai-Hsueh, Chang, Ping-Wei
Year of Publication 24.06.2004

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E/I core actuator commutation formula and control method

by CHANG PING-WEI, TENG TIM, YUAN BAUSAN, HIRANO KAZUHIRO, YANG PAI-HSUEH
Year of Publication 07.08.2007

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E/I core actuator commutation formula and control method

by Yang, Pai-Hsueh, Hirano, Kazuhiro, Chang, Ping-Wei, Teng, Tim, Yuan, Bausan
Year of Publication 07.08.2007

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STAGE EQUIPMENT AND EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

by UEDA TOSHIO, BINNARD MIKE, ARAI YOICHI, WATSON DOUGLAS C, MA WEN-HOU, NOVAK W THOMAS, YUAN BAUSAN, LOK KIRK, YANG PAI-HSUEH, TENG TINGIEN, HAZELTON ANDREW J
Year of Publication 06.10.2011

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On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage

by COAKLEY SCOTT, MASAKI KAZUO, YANG XIAO-FENG, BINNARD MICHAEL B, YUAN BAUSAN, HIRANO KAZUHIRO, YANG PAI-HSUEH
Year of Publication 06.11.2008

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Fine force actuator assembly for chemical mechanical polishing apparatuses

by Novak, W. Thomas, Watson, Douglas C, Yang, Pai-Hsueh, Yuan, Bausan
Year of Publication 06.02.2007

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Fine force actuator assembly for chemical mechanical polishing apparatuses

by NOVAK W. THOMAS, WATSON DOUGLAS C, YUAN BAUSAN, YANG PAI-HSUEH
Year of Publication 06.02.2007

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Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

by MA WEN-HOU, YUAN BAUSAN, BINNARD MICHAEL, YANG PAI-HSUEH, UETA TOSHIO, TENG TINGIEN
Year of Publication 18.05.2006

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Fine force actuator assembly for chemical mechanical polishing apparatuses

by NOVAK W. T, WATSON DOUGLAS C, YUAN BAUSAN, YANG PAI-HSUEH
Year of Publication 16.02.2006

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Feedforward control with reduced learning time for lithographic system to improve throughput and accuracy

by MAKINOUCHI SUSUMU, YAMAGUCHI ATSUSHI, YUAN BAUSAN, YANG PAI-HSUEH, HASHIMOTO HIDEYUKI
Year of Publication 20.10.2005

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E/I core actuator commutation formula and control method

by CHANG PING-WEI, TENG TIM, YUAN BAUSAN, HIRANO KAZUHIRO, YANG PAI-HSUEH
Year of Publication 06.10.2005

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Fine force control of actuators for chemical mechanical polishing apparatuses

by NOVAK W. T, WATSON DOUGLAS C, YUAN BAUSAN, YANG PAI-HSUEH
Year of Publication 08.09.2005

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Modular stage with reaction force cancellation

by CHANG PING-WEI, POON ALEX KA TIM, YANG PAI-HSUEH, KHO LEONARD WAI FUNG
Year of Publication 12.07.2005

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Modular stage with reaction force cancellation

by Poon, Alex Ka Tim, Kho, Leonard Wai Fung, Yang, Pai-Hsueh, Chang, Ping-Wei
Year of Publication 12.07.2005

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MODULAR STAGE WITH REACTION FORCE CANCELLATION

by CHANG PING-WEI, POON ALEX KA TIM, YANG PAI-HSUEH, KHO LEONARD WAI FUNG
Year of Publication 26.08.2004

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