Target for a physical vapor deposition system
LLOYD, MARK, VAN GOGH, JAMES, DORLEANS, FERNAND, TANG, HOWARD, YANG, SIYAUN, WEST, R. STEVE, HAGERTY, CHRISTOPHER
Year of Publication 20.09.2000
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Year of Publication 20.09.2000
Patent
Target for a physical vapor deposition system
LLOYD, MARK, VAN GOGH, JAMES, DORLEANS, FERNAND, TANG, HOWARD, YANG, SIYAUN, WEST, R. STEVE, HAGERTY, CHRISTOPHER
Year of Publication 10.09.1997
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Year of Publication 10.09.1997
Patent
Target and dark space shield for a physical vapor deposition system
YANG; SIYAUN, HAGERTY; CHRISTOPHER, DORLEANS; FERNAND, TANG; HOWARD, VAN GOGH; JAMES, WEST; R. STEVE, LLOYD; MARK
Year of Publication 19.08.1997
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Year of Publication 19.08.1997
Patent
Improved target and dark space shield for a physical vapor deposition system
JAMES V. GOGH, LLOYD, MARK, DORLEANS, FERNAND, TANG, HOWARD, R. STEVE WEST, YANG, SIYAUN, HAGERTY, CHRISTOPHER
Year of Publication 11.06.1999
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Year of Publication 11.06.1999
Patent