T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation
KAMIYA, Masao, YANAGITA, Taichiro, TANOUE, Hideto, OKE, Shinichiro, SUDA, Yoshiyuki, TAKIKAWA, Hirofumi, TAKI, Makoto, HASEGAWA, Yushi, ISHIKAWA, Takeshi, YASUI, Haruyuki
Published in Thin solid films (2010)
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Published in Thin solid films (2010)
Journal Article
T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation
Kamiya, Masao, Yanagita, Taichiro, Tanoue, Hideto, Oke, Shinichiro, Suda, Yoshiyuki, Takikawa, Hirofumi, Taki, Makoto, Hasegawa, Yushi, Ishikawa, Takeshi, Yasui, Haruyuki
Published in Thin solid films (31.12.2009)
Published in Thin solid films (31.12.2009)
Get full text
Journal Article