Monitoring method of contact etching stop
TANG, WEN-SHIANG, PENG, JIANG-REN, HUANG, CHUAN-JIE, YAN, MING-SHUO, CHEN, PEI-HUNG
Year of Publication 28.05.2001
Get full text
Year of Publication 28.05.2001
Patent
Method of recovering chamber after dry clean
TANG, WEN-SHIANG, HUANG, JENG-HAU, CHEN, SHR-FANG, YAN, MING-SHUO, CHEN, PEI-HUNG
Year of Publication 01.11.2000
Get full text
Year of Publication 01.11.2000
Patent
Apparatus for preventing the decrease of etching rate
LIN, WEN-BIN, WANG, CHUAN-YI, YANG, REN-YUAN, YAN, MING-SHUO, CHEN, TZAI-YI
Year of Publication 11.08.2001
Get full text
Year of Publication 11.08.2001
Patent