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"YAMAWAKU, JUN"
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PLASMA-PROCESSING DEVICE, AND PLASMA-PROCESSING METHOD
by
YAMAWAKU
,
Jun
Year of Publication
25.07.2024
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PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND REMOTE PLASMA SOURCE
by
YAMAWAKU Jun
Year of Publication
02.11.2023
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성막 장치 및 성막 방법
by
YAMAWAKU JUN
Year of Publication
19.09.2023
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PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
by
YAMAWAKU Jun
Year of Publication
20.04.2023
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FILM FORMING DEVICE AND FILM FORMING METHOD
by
YAMAWAKU
,
Jun
Year of Publication
18.08.2022
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플라스마 처리 장치
by
YAMAWAKU JUN
Year of Publication
24.03.2022
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DEVICE FOR FORMING PLASMA, DEVICE FOR PROCESSING SUBSTRATE, AND METHOD FOR FORMING PLASMA
by
YAMAWAKU Jun
Year of Publication
30.12.2021
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PLASMA PROCESSING DEVICE
by
YAMAWAKU
,
Jun
Year of Publication
11.02.2021
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성막 장치 및 성막 방법
by
YAMAWAKU JUN
Year of Publication
19.01.2021
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RADICAL SUPPLY DEVICE, RADICAL PROCESSING DEVICE, RADICAL GENERATION METHOD AND SUBSTRATE PROCESSING METHOD
by
YAMAWAKU Jun
,
MATSUDO Tatsuo
Year of Publication
18.01.2024
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FILM FORMING APPARATUS AND FILM FORMING METHOD
by
YAMAWAKU JUN
Year of Publication
07.10.2020
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PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
by
YAMAWAKU
,
Jun
Year of Publication
23.01.2020
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플라스마 처리 장치 및 플라스마 처리 방법
by
MATSUDO TATSUO
,
YAMAWAKU JUN
Year of Publication
19.01.2023
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FILM-FORMING DEVICE AND FILM-FORMING METHOD
by
YAMAWAKU Jun
Year of Publication
28.11.2019
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PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
by
YAMAWAKU Jun
,
MATSUDO Tatsuo
Year of Publication
09.12.2021
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PLASMA PROCESSING APPARATUS PLASMA PROCESSING METHOD AND RECORDING MEDIUM
by
YAMAWAKU JUN
Year of Publication
08.12.2017
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성막 장치 및 성막 방법
by
MATSUDO TATSUO
,
YAMAWAKU JUN
,
KIKUCHI TAKAMICHI
Year of Publication
08.03.2023
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FOCUS RING AND SUBSTRATE PROCESSING APPARATUS HAVING SAME
by
KOSHIMIZU CHISHIO
,
YAMAWAKU JUN
Year of Publication
08.01.2019
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FILM-FORMING DEVICE AND FILM-FORMING METHOD
by
KIKUCHI, Takamichi
,
YAMAWAKU
,
Jun
,
MATSUDO, Tatsuo
Year of Publication
13.01.2022
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SUBSTRATE TREATMENT DEVICE, FLUID ACTIVATION DEVICE, SUBSTRATE TREATMENT METHOD, AND FLUID ACTIVATION METHOD
by
KUBOTA Yusuke
,
OZAKI Shigenori
,
YAMANISHI Yoshiki
,
IIZUKA Hachishiro
,
YAMAWAKU Jun
,
SHINDO Takahiro
,
NARUSHIMA Masaki
,
NISHIOKA Masateru
Year of Publication
08.02.2024
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