Tetrahedral Amorphous Carbon Films By Filtered Cathodic Vacuum-Arc Deposition For Air-Bearing-Surface Overcoat
Inaba, Hiroshi, Furusawa, Kenji, Hirano, Shinya, Sasaki, Shinji, Todoroki, Satoru, Yamasaka, Minoru, Endou, Masayoshi
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Properties of Diamond-Like Carbon Films Fabricated by the Filtered Cathodic Vacuum Arc Method
Inaba, Hiroshi, Fujimaki, Shigehiko, Sasaki, Shinji, Hirano, Shinya, Todoroki, Satoru, Furusawa, Kenji, Yamasaka, Minoru, Shi, Xu
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
Get full text
Journal Article