POLYSILICON ROD AND METHOD FOR MANUFACTURING POLYSILICON ROD
YAMAGISHI NARUTOSHI, ISHIDA MASAHIKO, AOYAMA TAKESHI, YOSHIDA ATSUSHI, HOSHINO SHIGEO, KANEKO YOSHIO
Year of Publication 20.05.2024
Get full text
Year of Publication 20.05.2024
Patent
Polycrystalline silicon rod and method for producing polycrystalline silicon rod
HOSHINO NARUHIRO, ISHIDA MASAHIKO, AOYAMA TAKESHI, YOSHIDA ATSUSHI, YAMAGISHI, NARUTOSHI, KANEKO YOSHIO
Year of Publication 10.05.2024
Get full text
Year of Publication 10.05.2024
Patent