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Published in arXiv.org (27.03.2024)
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Published in arXiv.org (27.03.2024)
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Published in arXiv.org (25.03.2024)
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Published in arXiv.org (25.03.2024)
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Published in Journal of microelectromechanical systems (01.09.1997)
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Year of Publication 30.05.2019
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Year of Publication 30.05.2019
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