Single-chamber sequential curing of semiconductor wafers
Shrinivasan, Krishna, Wang, Feng, Kamian, George, Gentile, Steve, Yam, Mark
Year of Publication 20.03.2012
Get full text
Year of Publication 20.03.2012
Patent
Single-chamber sequential curing of semiconductor wafers
KAMIAN GEORGE, SHRINIVASAN KRISHNA, YAM MARK, WANG FENG, GENTILE STEVE
Year of Publication 20.03.2012
Get full text
Year of Publication 20.03.2012
Patent
ANNEALING APPARATUS USING TWO WAVELENGTHS OF RADIATION
ADAMS BRUCE E, MAYUR ABHILASH J, JENNINGS DEAN, PARIHAR VIJAY, HUNTER AARON MUIR, LIANG HAIFAN, YAM MARK, RANISH JOSEPH MICHAEL
Year of Publication 12.03.2015
Get full text
Year of Publication 12.03.2015
Patent
Thermal processing by scanning a laser line beam
MAYUR ABHILASH J, GOLDIN ALEXANDER, JENNINGS DEAN C, BEHRENS VERNON, YAM MARK, O'BRIEN PAUL A, TERITSKI LEONID M
Year of Publication 26.02.2015
Get full text
Year of Publication 26.02.2015
Patent
Annealing apparatus using two wavelengths of laser radiation
HUNTER AARON, MAYUR ABHILASH J, JENNINGS DEAN, ADAMS BRUCE, PARIHAR VIJAY, LIANG HAIFAN, YAM MARK, RANISH JOSEPH MICHAEL
Year of Publication 09.12.2014
Get full text
Year of Publication 09.12.2014
Patent
Annealing apparatus using two wavelengths of continuous wave laser radiation
HUNTER AARON, MAYUR ABHILASH J, JENNINGS DEAN, ADAMS BRUCE, PARIHAR VIJAY, LIANG HAIFAN, YAM MARK, RANISH JOSEPH MICHAEL
Year of Publication 18.11.2014
Get full text
Year of Publication 18.11.2014
Patent