High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining
Khalid, Waqas, Ali, Mohamed Sultan Mohamed, Dahmardeh, Masoud, Choi, Yongho, Yaghoobi, Parham, Nojeh, Alireza, Takahata, Kenichi
Published in Diamond and related materials (01.11.2010)
Published in Diamond and related materials (01.11.2010)
Get full text
Journal Article
리소그래피 장치에서 사용하기 위한 미러
YAGHOOBI PARHAM, BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, VAN DE KERKHOF MARCUS ADRIANUS, MOORS JOHANNES HUBERTUS JOSEPHINA
Year of Publication 21.01.2022
Get full text
Year of Publication 21.01.2022
Patent
미립자 파편의 궤적을 변경하기 위한 편향 장치를 구비한 리소그래피 시스템
NENCHEV GEORGI NENCHEV, VAN DE KERKHOF MARCUS ADRIANUS, JACOBS JOHANNES HENRICUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, UZGOREN ERAY, BAL KURSAT, HUANG YANG SHAN, RANJAN MANISH, DE VRIES SJOERD FRANS, ALBRIGHT RONALD PETER, YAGHOOBI PARHAM, BANINE VADIM YEVGENYEVICH, HUANG ZHUANGXIONG, NIKIPELOV ANDREY, BRULS RICHARD JOSEPH, RAASVELD THOMAS MAARTEN, FRIJNS OLAV WALDEMAR VLADIMIR, UMSTADTER KARL ROBERT, TE SLIGTE EDWIN
Year of Publication 27.09.2022
Get full text
Year of Publication 27.09.2022
Patent
EUV 리소그래피 시스템 내에서의 광학 요소 수명 연장
ERSHOV ALEXANDER IGOREVICH, WESTERLAKEN JAN STEVEN CHRISTIAAN, JACOBS JOHANNES HENRICUS WILHELMUS, ROMMERS JEROEN HUBERT, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, YAGHOOBI PARHAM, KEMPEN ANTONIUS THEODORUS WILHELMUS, FOMENKOV IGOR VLADIMIROVICH, KUZNETSOV ALEXEY SERGEEVICH, DUARTE RODRIGUES NUNES RUI MIGUEL, LAFORGE ANDREW DAVID, VAN DRENT WILLIAM PETER, BRIZUELA FERNANDO, WIEGGERS ROB CARLO, KIM ALEXANDER DOWNN, MOORS JOHANNES HUBERTUS JOSEPHINA, GOMES UMESH PRASAD, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MA YUE, ZHU QIUSHI, HUMMLER KLAUS MARTIN, LIU FEI, NEDANOVSKA ELENA, KORKMAZ CELAL, JONKERS PETER GERARDUS, VAN DE WIEL HUBERTUS JOHANNES
Year of Publication 05.11.2020
Get full text
Year of Publication 05.11.2020
Patent
A PATTERNING DEVICE VOLTAGE BIASING SYSTEM FOR USE IN EUV LITHOGRAPHY
NIKIPELOV, Andrey, YAKUNIN, Andrei, BROUNS, Derk, MYLAPRAVAN GANGADHARAN, Hariprasad, CLOIN, Christian, CATS, Selwyn, YAGHOOBI, Parham
Year of Publication 21.03.2024
Get full text
Year of Publication 21.03.2024
Patent
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
MOORS, Johnnes Hubertus Josephina, NIKIPELOV, Andrey, SALMASO, Guido, VERMEULEN, Paul Alexander, DE MEIJERE, Cornelis Adrianus, VAN DE KERKHOF, Marcus Adrianus, BANINE, Vadim Yevgenyevich, YAGHOOBI, Parham
Year of Publication 05.10.2023
Get full text
Year of Publication 05.10.2023
Patent
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
VERMEULEN, Paul, Alexander, NIKIPELOV, Andrey, SALMASO, Guido, DE MEIJERE, Cornelis, Adrianus, BANINE, Vadim, Yevgenyevich, MOORS, Johannes, Hubertus, Josephina, VAN DE KERKHOF, Marcus, Adrianus, YAGHOOBI, Parham
Year of Publication 28.06.2023
Get full text
Year of Publication 28.06.2023
Patent
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
BANINE, Vadim, NIKIPELOV, Andrey, SALMASO, Guido, VAN DE KERKHOF, Marcus, DE MEIJERE, Cornelis, MOORS, Johannes, VERMEULEN, Paul, YAGHOOBI, Parham
Year of Publication 03.03.2022
Get full text
Year of Publication 03.03.2022
Patent
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Moors, Johannes Hubertus Josephina, Wieggers, Rob Carlo, Leenders, Martinus Hendrikus Antonius, Duarte Rodrigues Nunes, Rui Miguel, Ma, Yue, Korkmaz, Celal, Westerlaken, Jan Steven Christiaan, Van Drent, William Peter, Zhu, Qiushi, Van De Wiel, Hubertus Johannes, Hummler, Klaus Martin, Brizuela, Fernando, Van Dijck, Hendrikus Alphonsus Ludovicus, Ershov, Alexander Igorevich, Laforge, Andrew David, Rommers, Jeroen Hubert, Jacobs, Johannes Henricus Wilhelmus, Kuznetsov, Alexey Sergeevich, Kempen, Antonius Theodorus Wilhelmus, Gomes, Umesh Prasad, Kim, Alexander Downn, Nedanovska, Elena, Liu, Fei, Jonkers, Peter Gerardus, Fomenkov, Igor Vladimirovich, Yaghoobi, Parham
Year of Publication 16.05.2024
Get full text
Year of Publication 16.05.2024
Patent
MIRROR FOR USE IN A LITHOGRAPHIC APPARATUS
JOHANNES HUBERTUS JOSEPHINA MOORS, MARCUS ADRIANUS VAN DE KERKHOF, PARHAM YAGHOOBI, ANDREY NIKIPELOV, VADIM YEVGENYEVICH BANINE
Year of Publication 30.11.2020
Get full text
Year of Publication 30.11.2020
Patent
Prolonging optical element lifetime in an EUV lithography system
Moors, Johannes Hubertus Josephina, Wieggers, Rob Carlo, Leenders, Martinus Hendrikus Antonius, Duarte Rodrigues Nunes, Rui Miguel, Ma, Yue, Korkmaz, Celal, Westerlaken, Jan Steven Christiaan, Van Drent, William Peter, Zhu, Qiushi, Van De Wiel, Hubertus Johannes, Hummler, Klaus Martin, Brizuela, Fernando, Van Dijck, Hendrikus Alphonsus Ludovicus, Ershov, Alexander Igorevich, Laforge, Andrew David, Rommers, Jeroen Hubert, Jacobs, Johannes Henricus Wilhelmus, Kuznetsov, Alexey Sergeevich, Kempen, Antonius Theodorus Wilhelmus, Gomes, Umesh Prasad, Kim, Alexander Downn, Nedanovska, Elena, Liu, Fei, Jonkers, Peter Gerardus, Fomenkov, Igor Vladimirovich, Yaghoobi, Parham
Year of Publication 19.12.2023
Get full text
Year of Publication 19.12.2023
Patent
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
PAUL ALEXANDER VERMEULEN, JOHANNES HUBERTUS JOSEPHINA MOORS, MARCUS ADRIANUS VAN DE KERKHOF, PARHAM YAGHOOBI, CORNELIS ADRIANUS DE MEIJERE, ANDREY NIKIPELOV, GUIDO SALMASO, VADIM YEVGENYEVICH BANINE
Year of Publication 20.07.2022
Get full text
Year of Publication 20.07.2022
Patent
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
PAUL ALEXANDER VERMEULEN, JOHANNES HUBERTUS JOSEPHINA MOORS, MARCUS ADRIANUS VAN DE KERKHOF, PARHAM YAGHOOBI, CORNELIS ADRIANUS DE MEIJERE, ANDREY NIKIPELOV, GUIDO SALMASO, VADIM YEVGENYEVICH BANINE
Year of Publication 19.04.2022
Get full text
Year of Publication 19.04.2022
Patent
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGING A TRAJECTORY OF PARTICULATE DEBRIS
BRULS, Richard Joseph, NIKIPELOV, Andrey, HUANG, Yang-Shan, TE SLIGTE, Edwin, DE VRIES, Sjoerd Frans, RAASVELD, Thomas Maarten, ALBRIGHT, Ronald Peter, UZGÖREN, Eray, BAL, Kursat, BANINE, Vadim Yevgenyevich, YAGHOOBI, Parham, MOORS, Johannes Hubertus Josephina, NENCHEV, Georgi Nanchev, JACOBS, Johannes Henricus Wilhelmus, FRIJNS, Olav Waldemar Vladimir, HUANG, Zhuangxiong, UMSTADTER, Karl Robert, VAN DE KERKHOF, Marcus Adrianus, RANJAN, Manish
Year of Publication 02.03.2023
Get full text
Year of Publication 02.03.2023
Patent