PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
YUN HSU, MING-TA HSU, YU-WEN WANG, BANG-SHUN LIU, FUHYUN TANG, SHAO-LUN WEI, YA-FAN KU
Year of Publication 26.10.2022
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Year of Publication 26.10.2022
Patent
PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
LIU, Bang-Shun, WANG, Yu-Wen, HSU, Ming-Ta, KU, Ya-Fan, HSU, Yu-Chen, WEI, Shao-Lun, TANG, Fuh-Chyun
Year of Publication 10.02.2022
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Year of Publication 10.02.2022
Patent
PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
YUN HSU, MING-TA HSU, YU-WEN WANG, BANG-SHUN LIU, FUHYUN TANG, SHAO-LUN WEI, YA-FAN KU
Year of Publication 24.06.2020
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Year of Publication 24.06.2020
Patent
PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANUFACTURING THE SAME
LIU, Bang-Shun, WANG, Yu-Wen, HSU, Ming-Ta, KU, Ya-Fan, HSU, Yu-Chen, WEI, Shao-Lun, TANG, Fuh-Chyun
Year of Publication 16.04.2020
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Year of Publication 16.04.2020
Patent