Dispersion and Polishing Mechanism of a Novel CeO2-LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass
Zhao, Zifeng, Zhang, Zhenyu, Shi, Chunjing, Feng, Junyuan, Zhuang, Xuye, Li, Li, Meng, Fanning, Li, Haodong, Xue, Zihang, Liu, Dongdong
Published in Materials (29.01.2023)
Published in Materials (29.01.2023)
Get full text
Journal Article
Dispersion and Polishing Mechanism of a Novel CeO 2 -LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass
Zhao, Zifeng, Zhang, Zhenyu, Shi, Chunjing, Feng, Junyuan, Zhuang, Xuye, Li, Li, Meng, Fanning, Li, Haodong, Xue, Zihang, Liu, Dongdong
Published in Materials (29.01.2023)
Get full text
Published in Materials (29.01.2023)
Journal Article
Dispersion and Polishing Mechanism of a Novel CeO[sub.2]-LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass
Zhao, Zifeng, Zhang, Zhenyu, Shi, Chunjing, Feng, Junyuan, Zhuang, Xuye, Li, Li, Meng, Fanning, Li, Haodong, Xue, Zihang, Liu, Dongdong
Published in Materials (01.01.2023)
Published in Materials (01.01.2023)
Get full text
Journal Article